NO2 gas sensors based on CVD tungsten diselenide monolayer

被引:68
作者
Wu, Yichuan [1 ,2 ,3 ]
Joshi, Nirav [2 ,4 ]
Zhao, Shilong [3 ,5 ,6 ,7 ,8 ]
Long, Hu [5 ,6 ,7 ,8 ]
Zhou, Liujiang [9 ]
Ma, Ge [10 ]
Peng, Bei [1 ]
Oliveira Jr, Osvaldo N. [4 ]
Zettl, Alex [5 ,6 ,7 ,8 ]
Lin, Liwei [2 ,3 ]
机构
[1] Univ Elect Sci & Technol China, Sch Mech & Elect Engn, Chengdu 611731, Peoples R China
[2] Univ Calif Berkeley, Berkeley Sensor & Actuator Ctr, Berkeley, CA 94720 USA
[3] Tsinghua Univ, Tsinghua Berkeley Shenzhen Inst, Shenzhen 518055, Peoples R China
[4] Univ Sao Paulo, Sao Carlos Inst Phys, BR-13560970 Sao Carlos, SP, Brazil
[5] Univ Calif Berkeley, Dept Phys, Berkeley, CA 94720 USA
[6] Univ Calif Berkeley, Mat Sci Div, Lawrence Berkeley Natl Lab, Berkeley, CA 94720 USA
[7] Univ Calif Berkeley, Kavli Energy NanoSci Inst, Berkeley, CA 94720 USA
[8] Lawrence Berkeley Natl Lab, Berkeley, CA 94720 USA
[9] Univ Elect Sci & Technol China, Inst Fundamental & Frontier Sci, Chengdu 610054, Peoples R China
[10] China Acad Ind Internet, Dept Intelligent Ind Res, Beijing 100084, Peoples R China
基金
巴西圣保罗研究基金会;
关键词
Two-dimensional layered WSe2; Gas sensor; Chemical vapor deposition; Selectivity; Recovery speed; TRANSITION-METAL DICHALCOGENIDES; CHEMICAL-VAPOR-DEPOSITION; SENSING CHARACTERISTICS; WSE2; MOS2; TEMPERATURE; SENSITIVITY; ADSORPTION; NANOSHEETS; GROWTH;
D O I
10.1016/j.apsusc.2020.147110
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Two-dimensional (2D) transition metal dichalcogenides (TMDs) are promising for gas sensors owing to their large surface-to-volume ratios, but the long recovery times stemming from the slow molecular desorption have been an important limitation. In this work, we report on a sensor for nitrogen dioxide (NO2) made with a diselenide (WSe2) monolayer synthesized via chemical vapor deposition, which functions within a range of concentrations from 100 ppb to 5 ppm and at various temperatures, including room temperature. When operated at an optimized temperature of 250 degrees C, the WSe2 sensor exhibited the fast recovery, with the response (tau(res)) and recovery (tau(rec)) times of 18 s and 38 s, respectively, when exposed to 100 ppb NO2 The sensor also features high selectivity toward NO2 in the presence of other target gases, in addition to reversibility and long-term stability within 60 days. The overall characteristics of the WSe2 sensor make it suitable to monitor indoor/outdoor environments, mainly if further optimization is made with sensor design based on a model for the sensing mechanism we present in this paper.
引用
收藏
页数:7
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