CuO-Ga2O3 Thin Films as a Gas-Sensitive Material for Acetone Detection

被引：21

作者：

Dyndal, Katarzyna ^{[1
]}

Zarzycki, Arkadiusz ^{[2
]}

Andrysiewicz, Wojciech ^{[3
]}

Grochala, Dominik ^{[4
]}

Marszalek, Konstanty ^{[1
]}

Rydosz, Artur ^{[1
]}

机构：

[1] AGH Univ Sci & Technol, Dept Elect, Al Mickiewicza 30, PL-30054 Krakow, Poland

[2] Polish Acad Sci, Inst Nucl Phys, PL-31342 Krakow, Poland

[3] CBRTP SA, Warynskiego 3A, PL-00645 Warsaw, Poland

[4] AGH Univ Sci & Technol, Dept Biocybernet & Biomed Engn, Al Mickiewicza 30, PL-30054 Krakow, Poland

来源：

SENSORS | 2020年 / 20卷 / 11期

关键词：

gas sensors; acetone detector; thin-films; copper oxides; gallium oxides; ATOMIC LAYER DEPOSITION; ELECTRICAL-PROPERTIES; SENSING PERFORMANCE; OPTICAL-PROPERTIES; LOW-TEMPERATURE; SOLAR-CELL; CUO; SENSOR; ADSORPTION; MORPHOLOGY;

D O I：

10.3390/s20113142

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The p-n heterostructures of CuO-Ga2O3 obtained by magnetron sputtering technology in a fully reactive mode (deposition in pure oxygen) were tested under exposure to low acetone concentrations. After deposition, the films were annealed at previously confirmed conditions (400 degrees C/4 h/synthetic air) and further investigated by utilization of X-ray diffraction (XRD), X-ray reflectivity (XRR), energy-dispersive X-ray spectroscopy (EDS). The gas-sensing behavior was tested in the air/acetone atmosphere in the range of 0.1-1.25 ppm, as well as at various relative humidity (RH) levels (10-85%). The highest responses were obtained for samples based on the CuO-Ga2O3 (4% at. Ga).

引用

页数：17

共 104 条

[21] Review on Smart Gas Sensing Technology [J].

Feng, Shaobin ;

Farha, Fadi ;

Li, Qingjuan ;

Wan, Yueliang ;

Xu, Yang ;

Zhang, Tao ;

Ning, Huansheng .

SENSORS, 2019, 19 (17)

[22] Selective detection of methane in domestic environments using a catalyst sensor system based on Ga2O3 [J].

Flingelli, GK ;

Fleischer, MM ;

Meixner, H .

SENSORS AND ACTUATORS B-CHEMICAL, 1998, 48 (1-3) :258-262

[23] Gas-sensitive electrical properties of pure and doped semiconducting Ga2O3 thick films [J].

Frank, J ;

Fleischer, M ;

Meixner, H .

SENSORS AND ACTUATORS B-CHEMICAL, 1998, 48 (1-3) :318-321

[24] Electrical doping of gas-sensitive, semiconducting Ga2O3 thin films [J].

Frank, J ;

Fleischer, M ;

Meixner, H .

SENSORS AND ACTUATORS B-CHEMICAL, 1996, 34 (1-3) :373-377

[25] Enhancement of sensitivity and conductivity of semiconducting Ga2O3 gas sensors by doping with SnO2 [J].

Frank, J ;

Fleischer, M ;

Meixner, H ;

Feltz, A .

SENSORS AND ACTUATORS B-CHEMICAL, 1998, 49 (1-2) :110-114

[26] Gas-Sensing Performances of Metal Oxide Nanostructures for Detecting Dissolved Gases: A Mini Review [J].

Guan, Wei ;

Tang, Na ;

He, Kuang ;

Hu, Xiaoying ;

Li, Mingshan ;

Li, Kaiming .

FRONTIERS IN CHEMISTRY, 2020, 8

[27] Review of Ga2O3-based optoelectronic devices [J].

Guo, D. ;

Guo, Q. ;

Chen, Z. ;

Wu, Z. ;

Li, P. ;

Tang, W. .

MATERIALS TODAY PHYSICS, 2019, 11

[28] Highly sensitive and selective H2S gas sensors based on flower-like WO3/CuO composites operating at low/room temperature [J].

He, Meng ;

Xie, Lili ;

Zhao, Xueling ;

Hu, Xiaobing ;

Li, Sihan ;

Zhu, Zhi-Gang .

JOURNAL OF ALLOYS AND COMPOUNDS, 2019, 788 :36-43

[29] A facile method for preparation of uniformly decorated-spherical SnO2 by CuO nanoparticles for highly responsive toluene detection at high temperature [J].

Hermawan, Angga ;

Asakura, Yusuke ;

Inada, Miki ;

Yin, Shu .

JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY, 2020, 51 (51) :119-129

[30] Development of gallium oxide power devices [J].

Higashiwaki, Masataka ;

Sasaki, Kohei ;

Kuramata, Akito ;

Masui, Takekazu ;

Yamakoshi, Shigenobu .

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2014, 211 (01) :21-26

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