CuO-Ga2O3 Thin Films as a Gas-Sensitive Material for Acetone Detection

被引：21

作者：

Dyndal, Katarzyna ^{[1
]}

Zarzycki, Arkadiusz ^{[2
]}

Andrysiewicz, Wojciech ^{[3
]}

Grochala, Dominik ^{[4
]}

Marszalek, Konstanty ^{[1
]}

Rydosz, Artur ^{[1
]}

机构：

[1] AGH Univ Sci & Technol, Dept Elect, Al Mickiewicza 30, PL-30054 Krakow, Poland

[2] Polish Acad Sci, Inst Nucl Phys, PL-31342 Krakow, Poland

[3] CBRTP SA, Warynskiego 3A, PL-00645 Warsaw, Poland

[4] AGH Univ Sci & Technol, Dept Biocybernet & Biomed Engn, Al Mickiewicza 30, PL-30054 Krakow, Poland

来源：

SENSORS | 2020年 / 20卷 / 11期

关键词：

gas sensors; acetone detector; thin-films; copper oxides; gallium oxides; ATOMIC LAYER DEPOSITION; ELECTRICAL-PROPERTIES; SENSING PERFORMANCE; OPTICAL-PROPERTIES; LOW-TEMPERATURE; SOLAR-CELL; CUO; SENSOR; ADSORPTION; MORPHOLOGY;

D O I：

10.3390/s20113142

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The p-n heterostructures of CuO-Ga2O3 obtained by magnetron sputtering technology in a fully reactive mode (deposition in pure oxygen) were tested under exposure to low acetone concentrations. After deposition, the films were annealed at previously confirmed conditions (400 degrees C/4 h/synthetic air) and further investigated by utilization of X-ray diffraction (XRD), X-ray reflectivity (XRR), energy-dispersive X-ray spectroscopy (EDS). The gas-sensing behavior was tested in the air/acetone atmosphere in the range of 0.1-1.25 ppm, as well as at various relative humidity (RH) levels (10-85%). The highest responses were obtained for samples based on the CuO-Ga2O3 (4% at. Ga).

引用

页数：17

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