Composition, XRD and morphology study of laser prepared LiNbO3 films

被引：11

作者：

Jelinek, M. ^{[1
,2
]}

Havranek, V. ^{[3
]}

Remsa, J. ^{[1
,2
]}

Kocourek, T. ^{[1
,2
]}

Vincze, A. ^{[4
]}

Bruncko, J. ^{[4
]}

Studnicka, V. ^{[1
]}

Rubesova, K. ^{[5
]}

机构：

[1] ASCR, Vvi, Inst Phys, Prague 18221 8, Czech Republic

[2] Czech Tech Univ, Fac Biomed Engn, Kladno, Czech Republic

[3] ASCR, Inst Nucl Phys, Rez, Czech Republic

[4] Ctr Int Laser, Bratislava 84104 4, Slovakia

[5] Inst Chem Technol, CR-16628 Prague 6, Czech Republic

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2013年 / 110卷 / 04期

关键词：

THIN-FILMS; DEPOSITION; GROWTH;

D O I：

10.1007/s00339-012-7191-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

LiNbO3 films were deposited by PLD from LiNbO3 crystalline or from three different stoichiometric or Li-enriched LiNbO3 targets. Polycrystalline films were prepared on SiO2/Si or sapphire substrates at temperatures T (S) similar to 650-750 A degrees C. Main attention was paid to the influence of targets preparation and the deposition conditions on films composition, morphology and crystallinity. The thin-film morphology was determined by SEM microscopy. The composition was measured by SIMS, RBS, PIXE and PIGE methods. Highly oriented, smooth and stoichiometric LiNbO3 films were synthesized.

引用

页码：883 / 888

页数：6

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