diamond film;
deflects;
thermal properties;
micro-electromechanical systems (MEMS);
D O I:
10.1016/j.diamond.2005.07.027
中图分类号:
T [工业技术];
学科分类号:
08 ;
摘要:
We have measured the temperature dependence of mechanical dissipation in tetrahedral amorphous carbon flexural and torsional resonators over the temperature range from 300 to 1023 K. The mechanical dissipation was found to be controlled by defects within the material, and the magnitude and temperature dependence of the dissipation were found to depend on whether flexural or torsional vibrational modes were excited. The defects that were active under flexural stresses have a relatively flat concentration from 0.4 to 0.7 eV with an ever increasing defect concentration up to 1.9 eV Under shear stresses (torsion), the defect activation energies increase immediately beginning at 0.4 eV, with increasing defect concentration at higher energies. (c) 2005 Elsevier B.V. All rights reserved.