Effect of dopant on microstructure and conductivity of ZnO thin film

被引：0
作者：
Liu, Y. H. [1 ]
Yan, Z. [1 ]
Zhou, X. Y. [1 ]
机构：
[1] Shanghai Univ Engn Sci, Sch Mat Engn, Shanghai 201620, Peoples R China
来源：
MATERIALS RESEARCH INNOVATIONS | 2013年 / 17卷
关键词：
ZnO; Thin film; Doping; Microstructure; GAS-SENSING PROPERTIES; CHEMICAL ROUTE; SENSOR; NANOSTRUCTURES; NANORODS; PROPERTY; SENSITIVITY; PERFORMANCE;
D O I：
10.1179/1432891713Z.000000000220
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Al and Ti doped ZnO thin films have been prepared by direct current magnetron cosputtering and thermal oxidation. The effects of these dopants on the microstructural, morphological and electrical properties of deposited films have been studied. The SEM demonstrated that the undoped ZnO thin film consisted of globular ZnO with particle size of similar to 100 nm. Scanning electron microscopy EDX analysis confirmed that the dopant content in the ZnO-Al and ZnO-Ti thin film was 2.78 and 3.75 at-% respectively. The particle in the ZnO-Ti thin film was blocky or granular with thorns and its size was several micrometers, while the particle in ZnO-Al thin film was porous granular and the size was similar to 2 mm. Resistance value testing and R/R calculation revealed that pure ZnO thin film had the highest gas sensitivity.
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收藏
页码：S224 / S228
页数：5
相关论文
共 21 条
  • [1] On-chip fabrication of ZnO-nanowire gas sensor with high gas sensitivity
    Ahn, M. -W.
    Park, K. -S.
    Heo, J. -H.
    Kim, D. -W.
    Choi, K. J.
    Park, J. -G.
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2009, 138 (01) : 168 - 173
  • [2] Effects of thickness and annealing on the properties of Ti-doped ZnO films by radio frequency magnetron sputtering
    Chang, Hung-Peng
    Wang, Fang-Hsing
    Chao, Jen-Chi
    Huang, Chia-Cheng
    Liu, Han-Wen
    [J]. CURRENT APPLIED PHYSICS, 2011, 11 (01) : S185 - S190
  • [3] High-sensitivity NO2 gas sensors based on flower-like and tube-like ZnO nanomaterials
    Chen, Mei
    Wang, Zhihua
    Han, Dongmei
    Gu, Fubo
    Guo, Guangsheng
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2011, 157 (02) : 565 - 574
  • [4] Chemical route to synthesis of mesoporous ZnO thin films and their liquefied petroleum gas sensor performance
    Dhawale, D. S.
    Lokhande, C. D.
    [J]. JOURNAL OF ALLOYS AND COMPOUNDS, 2011, 509 (41) : 10092 - 10097
  • [5] Gas-sensing performance enhancement in ZnO nanostructures by hierarchical morphology
    Guo, Weiwei
    Liu, Tianmo
    Zhang, Hejing
    Sun, Rong
    Chen, Yong
    Zeng, Wen
    Wang, Zhongchang
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2012, 166 : 492 - 499
  • [6] Photoluminescence investigation on the gas sensing property of ZnO nanorods prepared by plasma-enhanced CVD method
    Han, Ning
    Hu, Peng
    Zuo, Ahui
    Zhang, Dangwen
    Tian, Yajun
    Chen, Yunfa
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2010, 145 (01) : 114 - 119
  • [7] Sensor response formula for sensor based on ZnO nanostructures
    Hongsith, Niyom
    Wongrat, Ekasiddh
    Kerdcharoen, Teerakiat
    Choopun, Supab
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2010, 144 (01): : 67 - 72
  • [8] Room temperature deposition of Al-doped ZnO thin films on glass by RF magnetron sputtering under different Ar gas pressure
    Kim, Deok Kyu
    Kim, Hong Bae
    [J]. JOURNAL OF ALLOYS AND COMPOUNDS, 2011, 509 (02) : 421 - 425
  • [9] Pinecone-shaped ZnO nanostructures: Growth, optical and gas sensor properties.
    Liu, Kewei
    Sakurai, Makoto
    Aono, Masakazu
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2011, 157 (01) : 98 - 102
  • [10] Murray J. L., 1984, B ALLOY PHASE DIAGR, V5, P52
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