Micron-scale copper wires printed using femtosecond laser-induced forward transfer with automated donor replenishment

被引：35

作者：

Grant-Jacob, James A. ^{[1
]}

Mills, Benjamin ^{[1
]}

Feinaeugle, Matthias ^{[1
]}

Sones, Collin L. ^{[1
]}

Oosterhuis, Gerrit ^{[2
]}

Hoppenbrouwers, Marc B. ^{[3
]}

Eason, Robert W. ^{[1
]}

机构：

[1] Univ Southampton, Optoelect Res Ctr, Southampton SO9 5NH, Hants, England

[2] TNO Sci & Ind, NL-5600 HE Eindhoven, Netherlands

[3] Holst Ctr TNO, NL-5656 AE Eindhoven, Netherlands

来源：

OPTICAL MATERIALS EXPRESS | 2013年 / 3卷 / 06期

基金：

英国工程与自然科学研究理事会;

关键词：

THIN-FILMS; METAL; DEPOSITION; FABRICATION; MICROARRAYS; PATTERNS;

D O I：

10.1364/OME.3.000747

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We demonstrate the use of laser-induced forward transfer (LIFT) in combination with a novel donor replenishment scheme to print continuous copper wires. Wires of mm length, a few microns wide and submicron in height have been printed using a 800 nm, 1 kHz repetition rate, 150 fs pulsed laser. A 120 nm thick copper donor was used along with laser pulse energy densities of 0.16-0.21 J cm(-2) to print overlapping few-micron sized pads to form the millimeter long wires. The wires have a measured resistivity of 17 +/- 4 times that of bulk copper. (C) 2013 Optical Society of America

引用

页码：747 / 754

页数：8

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