[1] Chalmers Univ Technol, Dept Microtechnol & Nanosci MC2, SE-41296 Gothenburg, Sweden
[2] SHT Smart High Tech AB, SE-41296 Gothenburg, Sweden
[3] Shanghai Univ, Key Lab New Displays & Syst Applicat, Shanghai 200072, Peoples R China
[4] Shanghai Univ, SMIT Ctr, Sch Mech Engn & Automat, Shanghai 200072, Peoples R China