Preparation of Li-Al-O films by laser chemical vapor deposition

被引：11

作者：

Chi, Chen ^{[1
]}

Katsui, Hirokazu ^{[1
]}

Tu, Rong ^{[2
]}

Goto, Takashi ^{[1
]}

机构：

[1] Tohoku Univ, Inst Mat Res, Aoba Ku, Sendai, Miyagi 9808577, Japan

[2] Wuhan Univ Technol, State Key Lab Adv Technol Mat Synth & Proc, Wuhan 430070, Peoples R China

来源：

MATERIALS CHEMISTRY AND PHYSICS | 2014年 / 143卷 / 03期

关键词：

Chemical vapour deposition (CVD); Microstructure; Oxides; Composite materials; Crystal structure; OPTICAL-PROPERTIES; ALPHA-AL2O3; FILMS; LITHIUM ALUMINATE; ION-EXCHANGE; LUMINESCENCE; CRYSTAL; LI5ALO4; LIALO2; CELL;

D O I：

10.1016/j.matchemphys.2013.11.044

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Li-Al-O films were prepared on AlN substrates by laser chemical vapor deposition at deposition temperatures (T-dep) of 800-1300 K and molar ratios of Li to Al precursors (R-Li/Al) of 0.1-12. Single-phase alpha-LiAl5O8 films having faceted grains with pyramidal and polygonal shapes were obtained at T-dep = 1107-1280 K and R-Li/Al = 0.1-2.9. Single-phase gamma-LiAlO2 films having pyramidal grains were prepared at T-dep = 984-1238 K and R-Li/Al = 0.9-10.6. Under the conditions of T-dep = 923 K and R-Li/Al = 11.4, single-phase beta-Li5AlO4 films with a fluffy morphology were deposited. The highest deposition rate of Li-Al-O films was 98 mu m h(-1) with a mixture of gamma-LiAlO2 and beta-Li5AlO4 at T-dep = 944 K. (C) 2013 Elsevier B.V. All rights reserved.

引用

页码：1338 / 1343

页数：6

共 38 条

[1] LUMINESCENCE AND PHOTOACOUSTIC MEASUREMENTS OF LIAL5O8-FE-3+ [J].

ABRITTA, T ;

BARROS, FD .

JOURNAL OF LUMINESCENCE, 1988, 40-1 :187-188

[2] FABRICATION OF POROUS LIALO2 CERAMIC BREEDER MATERIAL [J].

ALVANI, C ;

CASADIO, S ;

LORENZINI, L ;

BRAMBILLA, G .

FUSION TECHNOLOGY, 1986, 10 (01) :106-112

[3] Synthesis and characterization of lithium aluminate red phosphors [J].

Aoyama, Masahiro ;

Amano, Yusuke ;

Inoue, Koji ;

Honda, Sawao ;

Hashimoto, Shinobu ;

Iwamoto, Yuji .

JOURNAL OF LUMINESCENCE, 2013, 135 :211-215

[4] Thermochemical Capture of Carbon Dioxide on Lithium Aluminates (LiAlO2 and Li5AlO4): A New Option for the CO2 Absorption [J].

Avalos-Rendon, Tatiana ;

Casa-Madrid, Julio ;

Pfeiffer, Heriberto .

JOURNAL OF PHYSICAL CHEMISTRY A, 2009, 113 (25) :6919-6923

[5] Industrial experience on the development of the molten carbonate fuel cell technology [J].

Bosio, B ;

Costamagna, P ;

Parodi, F ;

Passalacqua, B .

JOURNAL OF POWER SOURCES, 1998, 74 (02) :175-187

[6] ELABORATION AND IONIC-CONDUCTIVITY OF LI-AL-O THIN-FILMS [J].

CAUDRON, E ;

BAUD, G ;

BESSE, JP ;

JACQUET, M ;

BLONDIAUX, G .

SOLID STATE IONICS, 1994, 70 :629-635

[7] Formation process of Al2O3 thin film by reactive sputtering [J].

Chiba, Y. ;

Abe, Y. ;

Kawamura, M. ;

Sasaki, K. .

VACUUM, 2008, 83 (03) :483-485

[8]

Cook L.P., 1992, Ceram. Trans, V27, P193

[9]

Ge Yadong, 2012, Frontiers of Chemical Science and Engineering, V6, P415

[10] High-speed deposition of zirconia films by laser-induced plasma CVD [J].

Goto, T .

SOLID STATE IONICS, 2004, 172 (1-4) :225-229

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