Simulation and analysis of solenoidal ion sources

被引：25

作者：

Alderwick, A. R. ^{[1
]}

Jardine, A. P. ^{[1
]}

Hedgeland, H. ^{[1
]}

MacLaren, D. A. ^{[1
]}

Allison, W. ^{[1
]}

Ellis, J. ^{[1
]}

机构：

[1] Univ Cambridge, Cavendish Lab, Cambridge CB3 0HE, England

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2008年 / 79卷 / 12期

关键词：

finite element analysis; ion sources; plasma sources;

D O I：

10.1063/1.3030858

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We present a detailed analysis and simulation of solenoidal, magnetically confined electron bombardment ion sources, aimed at molecular beam detection. The aim is to achieve high efficiency for singly ionized species while minimizing multiple ionization. Electron space charge plays a major role and we apply combined ray tracing and finite element simulations to determine the properties of a realistic geometry. The factors controlling electron injection and ion extraction are discussed. The results from simulations are benchmarked against experimental measurements on a prototype source.

引用

页数：9

共 19 条

[1] Insertion of an electron beam ionizer in a quadrupole spectrometer for secondary neutral mass analysis [J].

Ameziane, O ;

Blanco, JM ;

Serrano, JJ ;

Guzmán, B ;

Aguilar, M .

EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, 2003, 22 (03) :231-235

[2]

BASSI D, 1988, ATOMIC MOL BEAM METH, V1

[3]

Boyd T. J. M., 1969, PLASMA DYNAMICS

[4] ELECTRON BOMBARDMENT MOLECULAR BEAM DETECTOR [J].

BRINK, GO .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1966, 37 (07) :857-&

[5]

Brown I G, 1989, The Physics and Technology of Ion Sources

[6] HIGH-INTENSITY BEAM OF METASTABLE HELIUM-ATOMS WITH GOOD VELOCITY RESOLUTION [J].

BRUTSCHY, B ;

HABERLAND, H .

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1977, 10 (01) :90-94

[7] NONLINEARITIES IN SENSITIVITY OF QUADRUPOLE PARTIAL-PRESSURE ANALYZERS OPERATING AT HIGHER GAS-PRESSURES [J].

COWEN, MC ;

ALLISON, W ;

BATEY, JH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1994, 12 (01) :228-234

[8] ELECTRON SPACE-CHARGE EFFECTS IN ION SOURCES FOR RESIDUAL-GAS ANALYSIS [J].

COWEN, MC ;

ALLISON, W ;

BATEY, JH .

MEASUREMENT SCIENCE AND TECHNOLOGY, 1993, 4 (01) :72-78

[9] Design and performance of a highly efficient mass spectrometer for molecular beams [J].

DeKieviet, M ;

Dubbers, D ;

Klein, M ;

Pieles, U ;

Schmidt, C .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2000, 71 (05) :2015-2018

[10] Status report on the development of a tubular electron beam ion source [J].

Donets, ED ;

Donets, EE ;

Becker, R ;

Lijeby, L ;

Rensfelt, KG ;

Beebe, EN ;

Pikin, AI .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2004, 75 (05) :1566-1568

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