Numerical and experimental comparison of MEMS suspended plates dynamic behaviour under squeeze film damping effect

被引：26

作者：

Soma, Aurelio ^{[1
]}

De Pasquale, Giorgio ^{[1
]}

机构：

[1] Polytecn Torino, Dept Mech, I-10129 Turin, Italy

来源：

ANALOG INTEGRATED CIRCUITS AND SIGNAL PROCESSING | 2008年 / 57卷 / 03期

关键词：

MEMS; Resonator; Finite element; Optical interferometry; Dynamic; Damping;

D O I：

10.1007/s10470-008-9165-x

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

Dynamic behaviour of oscillating perforated microplates under the effect of squeeze film damping is analyzed. Two simplified finite element numerical approaches are adopted to predict damping and stiffness effects transferred from the surrounding ambient air to oscillating structures; the effects of holes cross section and plate dimension are observed. The applicability of the numerical models in terms of precision of results and mesh density is investigated. Results obtained by FE models are compared with experimental measurements conduced by an optical interferometric microscope.

引用

页码：213 / 224

页数：12

共 24 条

[1]

*ANSYS, ANSYS US MAN

[2] Modified Reynolds' equation and analytical analysis of squeeze-film air damping of perforated structures [J].