3D-printed microelectronics for integrated circuitry and passive wireless sensors

被引:230
作者
Wu, Sung-Yueh [1 ,2 ,3 ]
Yang, Chen [1 ,3 ]
Hsu, Wensyang [2 ]
Lin, Liwei [1 ,3 ]
机构
[1] Univ Calif Berkeley, Dept Mech Engn, Berkeley, CA 94720 USA
[2] Natl Chiao Tung Univ, Dept Mech Engn, Hsinchu 30010, Taiwan
[3] Univ Calif Berkeley, Berkeley Sensor & Actuator Ctr, Berkeley, CA 94720 USA
关键词
additive manufacturing; radio-frequency passive sensors; 3D inductors and capacitors; three-dimensional printing; wireless sensing; 3D; PRESSURE; DESIGN; LAB;
D O I
10.1038/micronano.2015.13
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Three-dimensional (3D) additive manufacturing techniques have been utilized to make 3D electrical components, such as resistors, capacitors, and inductors, as well as circuits and passive wireless sensors. Using the fused deposition modeling technology and a multiple-nozzle system with a printing resolution of 30 mu m, 3D structures with both supporting and sacrificial structures are constructed. After removing the sacrificial materials, suspensions with silver particles are injected subsequently solidified to form metallic elements/interconnects. The prototype results show good characteristics of fabricated 3D microelectronics components, including an inductor-capacitor-resonant tank circuitry with a resonance frequency at 0.53 GHz. A 3D "smart cap" with an embedded inductor-capacitor tank as the wireless passive sensor was demonstrated to monitor the quality of liquid food (e.g., milk and juice) wirelessly. The result shows a 4.3% resonance frequency shift from milk stored in the room temperature environment for 36 h. This work establishes an innovative approach to construct arbitrary 3D systems with embedded electrical structures as integrated circuitry for various applications, including the demonstrated passive wireless sensors.
引用
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页数:9
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