Different Ways to Plasma-Polymerize HMDSO in DBD Configuration at Atmospheric Pressure for Corrosion Protection

被引:61
作者
Bour, Jerome [1 ]
Bardon, Julien [1 ]
Aubriet, Hugues [1 ]
Del Frari, Doriane [1 ]
Verheyde, Bert [2 ]
Dams, Roel [2 ]
Vangeneugden, Dirk [2 ]
Ruch, David [1 ]
机构
[1] CRPHT, Lab Technol Ind, L-4002 Esch Sur Alzette, Luxembourg
[2] Vlaamse Instelling Technol Onderzoek, Dept Mat, B-2400 Mol, Belgium
关键词
cold plasma; corrosion; dielectric barrier discharges (DBD); hexamethyldisiloxane (HMDSO); plasma polymerization;
D O I
10.1002/ppap.200800052
中图分类号
O59 [应用物理学];
学科分类号
摘要
Organosilicon layers were deposited on galvanized steel to give a protective coating against corrosion. HMDSO was atomized and injected into a DBD plasma at atmospheric pressure. Plasma-polymerized HMDSO layers were different when HMDSO nanodroplets reacted directly in the plasma area or when such droplets reacted with the plasma once deposited on the surface. Addition of a plasma curing step was also studied. influence of the deposition method on the properties of ppHMDSO layers was also studied. Layer structure was measured by SEM and interferometry, and its chemical structure was analyzed by FTIR and XPS. Corrosion resistance, which was measured by electrochemistry, was significantly increased when a plasma curing step was performed.
引用
收藏
页码:788 / 796
页数:9
相关论文
共 24 条
[1]   Deposition of Organosilicon-Based Anticorrosion Layers on Galvanized Steel by Atmospheric Pressure Dielectric Barrier Discharge Plasma [J].
Bardon, Julien ;
Bour, Jerome ;
Aubriet, Hugues ;
Ruch, David ;
Verheyde, Bert ;
Dams, Roel ;
Paulussen, Sabine ;
Rego, Robby ;
Vangeneugden, Dirk .
PLASMA PROCESSES AND POLYMERS, 2007, 4 :S445-S449
[2]   Correlation of morphology and barrier properties of thin microwave plasma polymer films on metal substrate [J].
Barranco, V ;
Carpentier, J ;
Grundmeier, G .
ELECTROCHIMICA ACTA, 2004, 49 (12) :1999-2013
[3]  
BEHNKE JF, 2004, HAK 9 INT S PAD IT
[4]   Analysis of low-k organosilicon and low-density silica films deposited in HMDSO plasmas [J].
Borvon, G ;
Goullet, A ;
Granier, A ;
Turban, G .
PLASMAS AND POLYMERS, 2002, 7 (04) :341-352
[5]   Organic-inorganic hybrid coatings for corrosion protection [J].
Chou, TP ;
Chandrasekaran, C ;
Limmer, SJ ;
Seraji, S ;
Wu, Y ;
Forbess, MJ ;
Nguyen, C ;
Cao, GZ .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 2001, 290 (2-3) :153-162
[6]   Comparison between continuous and microwave oxygen plasma post-treatment on organosilicon plasma deposited layers: Effects on structure and properties [J].
Clergereaux, R. ;
Calafat, M. ;
Benitez, F. ;
Escaich, D. ;
de Larclause, I. Savin ;
Raynaud, P. ;
Esteve, J. .
THIN SOLID FILMS, 2007, 515 (7-8) :3452-3460
[7]   Application of plasma deposited organosilicon thin films for the corrosion protection of metals [J].
Fracassi, E ;
d'Agostino, R ;
Palumbo, F ;
Angelini, E ;
Grassini, S ;
Rosalbino, F .
SURFACE & COATINGS TECHNOLOGY, 2003, 174 :107-111
[8]   GC-MS investigation of hexamethyldisiloxane-oxygen fed plasmas [J].
Fracassi, F ;
d'Agostino, R ;
Fanelli, F ;
Fornelli, A ;
Palumbo, F .
PLASMAS AND POLYMERS, 2003, 8 (04) :259-269
[9]  
Grundmeier G, 1998, MATER CORROS, V49, P150, DOI 10.1002/(SICI)1521-4176(199803)49:3<150::AID-MACO150>3.0.CO
[10]  
2-X