EFFECT OF SURROUNDING HYDROGEN GAS ON FRICTION AND WEAR CHARACTERISTICS OF DLC FILMS

被引:0
作者
Oshima, Kenta [1 ]
Tokuta, Yuuki [1 ]
Tsuboi, Ryo [2 ]
Sasaki, Shinya [2 ]
Kawaguchi, Masahiro [3 ]
机构
[1] Tokyo Univ Sci, Grad Sch, Tokyo 162, Japan
[2] Tokyo Univ Sci, Dept Mech Engn, Tokyo, Japan
[3] Tokyo Metropolitan Ind Technol Res Inst, Tokyo, Japan
来源
ICEM15: 15TH INTERNATIONAL CONFERENCE ON EXPERIMENTAL MECHANICS | 2012年
关键词
D O I
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中图分类号
T [工业技术];
学科分类号
08 ;
摘要
DLC (Diamond-like Carbon) film holds promise for a lot of machine elements as a hard thin film with an excellent frictional property and wear resistance. We focused on surrounding atmospheric effects on tribological characteristics of DLC films. DLC films were synthesized by PBII&D (Plasma Based Ion Implantation & Deposition), conventional CVD and PVD methods. Tribological properties were evaluated in air, high vacuum and decompression hydrogen condition by using a ball-on-disk sliding tester. The friction and wear properties showed different tendencies depending on the atmospheric conditions
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页数:2
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