EFFECT OF SURROUNDING HYDROGEN GAS ON FRICTION AND WEAR CHARACTERISTICS OF DLC FILMS

被引：0
作者：
Oshima, Kenta [1 ]
Tokuta, Yuuki [1 ]
Tsuboi, Ryo [2 ]
Sasaki, Shinya [2 ]
Kawaguchi, Masahiro [3 ]
机构：
[1] Tokyo Univ Sci, Grad Sch, Tokyo 162, Japan
[2] Tokyo Univ Sci, Dept Mech Engn, Tokyo, Japan
[3] Tokyo Metropolitan Ind Technol Res Inst, Tokyo, Japan
来源：
ICEM15: 15TH INTERNATIONAL CONFERENCE ON EXPERIMENTAL MECHANICS | 2012年
关键词：
D O I：
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中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
DLC (Diamond-like Carbon) film holds promise for a lot of machine elements as a hard thin film with an excellent frictional property and wear resistance. We focused on surrounding atmospheric effects on tribological characteristics of DLC films. DLC films were synthesized by PBII&D (Plasma Based Ion Implantation & Deposition), conventional CVD and PVD methods. Tribological properties were evaluated in air, high vacuum and decompression hydrogen condition by using a ball-on-disk sliding tester. The friction and wear properties showed different tendencies depending on the atmospheric conditions
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页数：2
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