Optical properties of trimethylboron and nitrogen codoped amorphous carbon films

被引:3
作者
Hayashi, Y
Ishikawa, S
Soga, T
Jimbo, T
Adachi, M
Umeno, M
机构
[1] Nagoya Inst Technol, Dept Environm Technol & Urban Planning, Showa Ku, Nagoya, Aichi 4668555, Japan
[2] Nagoya Inst Technol, Dept Elect & Comp Comp Engn, Showa Ku, Nagoya, Aichi 4668555, Japan
来源
INTERNATIONAL JOURNAL OF MODERN PHYSICS B | 2002年 / 16卷 / 6-7期
关键词
D O I
10.1142/S0217979202010920
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on the efficient photoluminescence (PL) and optical properties of hydrogenated amorphous carbon thin films codoped with nitrogen and trimethylboron (TMB) grown by rf plasma-enhanced chemical vapor deposition at room temperature. The study clearly shows the observation of discrete PL emission peaks. The PL intensity of the film deposited with 20 seem TMB is more than 10(3) times than that of the film deposited without TMB, The change of optical bandgap and PL emission energy with TMB flow rate are discussed based on sp(3) and sp(2) C networks. Angular dependence of the PL spectra revealed that the origin of multiple sharp peaks is due to Fabry-Perot cavity interference effect.
引用
收藏
页码:1096 / 1100
页数:5
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