A Novel Offset Cancellation Based on Parasitic-Insensitive Switched-Capacitor Sensing Circuit for the Out-of-Plane Single-Gimbaled Decoupled CMOS-MEMS Gyroscope

被引：1
作者：
Chang, Ming-Hui [1 ]
Huang, Han-Pang [1 ]
机构：
[1] Natl Taiwan Univ, Dept Mech Engn, Taipei 10617, Taiwan
来源：
SENSORS | 2013年 / 13卷 / 03期
关键词：
out-of-plane gyroscope; parasitic-insensitive switched-capacitor (PISC); Sigma Delta ADC;
D O I：
10.3390/s130303568
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
This paper presents a novel parasitic-insensitive switched-capacitor (PISC) sensing circuit design in order to obtain high sensitivity and ultra linearity and reduce the parasitic effect for the out-of-plane single-gimbaled decoupled CMOS-MEMS gyroscope (SGDG). According to the simulation results, the proposed PISC circuit has better sensitivity and high linearity in a wide dynamic range. Experimental results also show a better performance. In addition, the PISC circuit can use signal processing to cancel the offset and noise. Thus, this circuit is very suitable for gyroscope measurement.
引用
收藏
页码：3568 / 3587
页数：20
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