Laser direct Cu patterning utilizing a commercially available low-cost 3D printer

被引:1
作者
Chakraborty, Sajal [1 ]
Choi, Kyeong-Keun [2 ]
Ahn, Sung Il [1 ]
机构
[1] Pusan Natl Univ, Inst Plast Informat & Energy Mat, Dept Chem Educ, Grad Dept Chem Mat, Busandaehakro 63-2, Busan 46241, South Korea
[2] Pohang Univ Sci & Technol POSTECH, Natl Inst Nanomat Technol NINT, San 31, Pohang 790784, South Korea
关键词
3D printer; Laser direct writing; Copper electrode; Metal-organic decomposition; COPPER; REDUCTION; INK;
D O I
10.1016/j.jmapro.2022.10.021
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This study evaluated an inexpensive 3D printer (below 1000 USD) as a cost effective laser direct writing machine. This printer was applied to patterning copper (Cu) electrodes along with characterizing laser modules, such as the power stability of the laser, scan speed, pattern width against laser power, and position precision of the pattern. The laser power, controlled by a pulse width modulation signal, fluctuated by approximately 7 % and decreased by 2.1 % during the measurement period. After multiple laser scanning, the positional stability according to the thickness of the patterned Cu line showed a difference of up to 3.5 mu m at the center of the line pattern. Depending on the laser power, line defects appearing at the center of the Cu patterns were observed at the focal length of the laser and disappeared at longer or shorter focal lengths. As the laser power was increased from 6.3 % to 100 %, the width of the patterned Cu lines increased from 22 to 246 mu m. This appears to be due to the light scattering of the Cu crystals that form early when the laser is incident. A 143 nm thick 1 cm(2) Cu pattern exhibited a resistance of 2.6 x 10(-5) Omega.cm. Because this method uses a 3D printer that can control the z-height during laser processing, a Cu pattern-actuated LED on a three-dimensional glass surface was demonstrated using a set of experimental conditions based on the results.
引用
收藏
页码:531 / 538
页数:8
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