Real-time Multi-point Diffraction-based Imaging System (ReMuDis) for Strain Measurement

被引：0

作者：

Koh, Wing Onn ^{[1
]}

Zhu, Hui ^{[1
]}

机构：

[1] Nanyang Polytech, Sch Engn, Singapore, Singapore

来源：

INTERNATIONAL CONFERENCE ON OPTICAL AND PHOTONIC ENGINEERING (ICOPEN 2015) | 2015年 / 9524卷

关键词：

SENSOR;

D O I：

10.1117/12.2189286

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, we propose a real-time solution based on multi-point diffraction-based interferometer that is capable of 2-dimensional full-field, in-plane strain measurement and analysis with micrometric sensitivity and accuracy. We discuss the various techniques used to provide real-time dynamic analysis of strain over space and time so as to highlight trends of potential in-situ stress build-up over a device.

引用

页数：10

共 8 条

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