Growth Study of Ion Assisted Evaporated Molybdenum Thin Films

被引：0
|
作者：
Yadav, P. K. [1 ]
Nayak, M. [1 ]
Lodha, G. S. [1 ]
Rai, S. [1 ]
机构：
[1] Raja Ramanna Ctr Adv Technol, Ind Synchrotrons Utilizat Div, Xray Opt Sect, Indore 452013, Madhya Pradesh, India
来源：
INDIAN VACUUM SOCIETY SYMPOSIUM ON THIN FILMS: SCIENCE & TECHNOLOGY | 2012年 / 1451卷
关键词：
Thin film growth; Ion assisted electron beam evaporation; X-ray reflectivity; Microstructural analysis;
D O I：
10.1063/1.4732395
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
We reported optimization of ion-to-atom ratios and ion energy for growth of molybdenum thin film on oxidized silicon substrate using ion assisted electron beam evaporation system. The ion-to-atom ratio is varied by independently adjusting the ion current density and deposition rate. The structural characterization of the films is carried out by hard X-ray reflectivity. We observed improvement in film density from 85.5% to 98.2% and film roughness from similar to 2 nm to 0.84nm on similar to 26 nm thick Mo film by optimizing ion parameters. The observed results are discussed considering the effect of kinetic of adatoms during growth of film.
引用
收藏
页码：145 / 147
页数：3
相关论文
共 50 条
  • [31] Autocatalytic reaction model: a phenomenology for nucleation-coalescence-growth of thin films
    Suemitsu, M
    Togashi, H
    Abe, T
    THIN SOLID FILMS, 2003, 428 (1-2) : 83 - 86
  • [32] Kinetic Monte Carlo Simulations of Submonolayer Growth of NiTi Alloy Thin Films
    Zhu, Y. G.
    Rong, H. B.
    JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE, 2010, 7 (08) : 1469 - 1474
  • [33] Ion beam analysis of copper selenide thin films prepared by chemical bath deposition
    Andrade, E
    García, VM
    Nair, PK
    Nair, MTS
    Zavala, EP
    Huerta, L
    Rocha, MF
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2000, 161 : 635 - 640
  • [34] Growth of β-NaGaO2 thin films using ultrasonic spray pyrolysis
    Suzuki, Issei
    Suzuki, Shunichi
    Watanabe, Tatsuya
    Kita, Masao
    Omata, Takahisa
    JOURNAL OF ASIAN CERAMIC SOCIETIES, 2022, 10 (02) : 520 - 529
  • [35] Tuning the Co/Sr stoichiometry of SrCoO2.5 thin films by RHEED assisted MBEgrowth
    Schoeffmann, P.
    Puetter, S.
    Schubert, J.
    Zander, W.
    Barthel, J.
    Zakalek, P.
    Waschk, M.
    Heller, R.
    Bruekel, T.
    MATERIALS RESEARCH EXPRESS, 2020, 7 (11)
  • [36] Development of an ion-beam sputtering system for depositing thin films and multilayers of alloys and compounds
    Gupta, M
    Gupta, A
    Phase, DM
    Chaudhari, SM
    Dasannacharya, BA
    APPLIED SURFACE SCIENCE, 2003, 205 (1-4) : 309 - 322
  • [37] Effect of Co-evaporant Induced Crystallization on Needle Growth of Phthalocyanine Thin Films
    Kaji, Toshihiko
    Nakao, Satoru
    Hiramoto, Masahiro
    MOLECULAR CRYSTALS AND LIQUID CRYSTALS, 2013, 578 (01) : 63 - 67
  • [38] Accurate measurement of deposition rates for growth of Bi-based oxide thin films
    Zhang, Bingsen
    Qi, Yang
    CRYSTAL RESEARCH AND TECHNOLOGY, 2011, 46 (04) : 340 - 344
  • [39] Nanoscale Transition Metal Thin Films: Growth Characteristics and Scaling Law for Interlayer Formation
    Chandrasekaran, Anirudhan
    van de Kruijs, Robbert W. E.
    Sturm, Jacobus M.
    Zameshin, Andrey A.
    Bijkerk, Fred
    ACS APPLIED MATERIALS & INTERFACES, 2019, 11 (49) : 46311 - 46326
  • [40] The role of self-shadowing on growth and scaling laws of faceted polycrystalline thin films
    Ophus, Colin
    Ewalds, Timo
    Luber, Erik J.
    Mitlin, David
    ACTA MATERIALIA, 2010, 58 (15) : 5150 - 5159
12345