Boron diffused emitters passivated with Al2O3 films

被引：0

作者：

Masmitja, G. ^{[1
]}

Ortega, P. ^{[1
]}

Lopez, G. ^{[1
]}

Calle, E. ^{[1
]}

Garcia, M. ^{[1
]}

Martin, I. ^{[1
]}

Orpella, A. ^{[1
]}

Voz, C. ^{[1
]}

Alcubilla, R. ^{[1
]}

机构：

[1] Univ Politecn Cataluna, Micro & Nano Technol Res Grp MNT, Barcelona, Spain

来源：

PROCEEDINGS OF THE 2013 SPANISH CONFERENCE ON ELECTRON DEVICES (CDE 2013) | 2013年

关键词：

Boron emitter; Al2O3; silicon; solar cells; lifetime;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work we study the fabrication and characterization of boron diffused emitters using FZ c-Si(n) substrates. Emitter surface was passivated with Al2O3 (25 nm thick) layers deposited by thermal atomic layer deposition ALD technique. This study covers a broad emitter sheet resistance R-sh range from 20 to 250 Omega/sq using both polished and textured wafers. Emitter electrical quality was tested by means of lifetime measurements using quasi-stationary photoconductance QSS-PC method. Dark saturation emitter current densities J(oe)'s were extracted from lifetime measurements resulting in J(oe)'s values ranging from 10 to 150 fA/cm(2) depending on R-sh. These results are in the-state-of-the-art in boron emitter passivation.

引用

页码：329 / 332

页数：4

共 8 条

[1] Excellent boron emitter passivation for high-efficiency Si wafer solar cells using AlOx/SiNx dielectric stacks deposited in an industrial inline plasma reactor [J].

Duttagupta, Shubham ;

Lin, Fen ;

Shetty, Kishan Devappa ;

Aberle, Armin G. ;

Hoex, Bram .

PROGRESS IN PHOTOVOLTAICS, 2013, 21 (04) :760-764

[2] High-Efficiency Crystalline Silicon Solar Cells [J].

Glunz, S. W. .

ADVANCES IN OPTOELECTRONICS, 2007, 2007

[3]

Kerr M. J., 2003, PROG IN PHOTOVOLT RE, V11

[4] Charge carrier lifetime degradation in Cz silicon through the formation of a boron-rich layer during BBr3 diffusion processes [J].

Kessler, Michael Andreas ;

Ohrdes, Tobias ;

Wolpensinger, Bettina ;

Harder, Nils-Peter .

SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2010, 25 (05)

[5]

Lopez G., 2012, PROC 27TH EU PVSEC

[6] Industrial Silicon Wafer Solar Cells [J].

Neuhaus, Dirk-Holger ;

Muenzer, Adolf .

ADVANCES IN OPTOELECTRONICS, 2007, 2007

[7] Very low recombination phosphorus emitters for high efficiency crystalline silicon solar cells [J].

Ortega, P. ;

Vetter, M. ;

Bermejo, S. ;

Alcubilla, R. .

SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2008, 23 (12)

[8]

Schmidt J., 2008, PROG PHOTOVOLT RES A, V16

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