Femtosecond laser induced porosity in poly-methyl methacrylate

被引:27
作者
Baset, Farhana [1 ]
Villafranca, Ana [1 ]
Guay, Jean-Michel [1 ]
Bhardwaj, Ravi [1 ]
机构
[1] Univ Ottawa, Dept Phys, Ottawa, ON K1N 6N5, Canada
关键词
Laser material processing; Surface structuring; Femtosecond phenomena; Nanostructure fabrication; PERIODIC SURFACE-STRUCTURE; ABLATION; PULSES; PMMA; POLYCARBONATE; DIELECTRICS; IMPLANTS;
D O I
10.1016/j.apsusc.2013.06.043
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We show that femtosecond laser ablation of poly-methyl methacrylate (PMMA) induces porosity within the ablation crater that increases with pulse energy/fluence and number of laser shots. For deeper craters the porosity evolves into 3D honeycomb like structure on the sidewalls. Using imaging technique, we show that the porous area fraction decreases with pulse energy while the pore size distribution peaks at a pore area of 0.037 mu m(2) at higher energies. In line ablation, the pore size increases with the speed at which the laser focus is moved. (C) 2013 Elsevier B.V. All rights reserved.
引用
收藏
页码:729 / 734
页数:6
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