Research on Calibration and Parameter Compensation of MEMS Inertial Sensors Based on Error Analysis

Error analysis and compensation are needed for MEMS inertial measurement unit (MEMS IMU) have shortcomings like low measurement precision and high noise, in order to improve the precision of the system. Based on the working principle of MEMS accelerometer and gyroscope, error models of MEMS accelerometer and gyroscope were established at room temperature according to the error source analysis. Then, a method called dynamic flips of six-position was used to calibrate the error parameters of MEMS IMU. The error parameters were calculated by using of a large number of measured data. The simulation results show that after the compensation of the calibrated parameters, the precision of MEMS IMU has been improved 1 to 2 magnitudes.