A Method for Expansion of Z-Directional Measurement Range in a Mode-Locked Femtosecond Laser Chromatic Confocal Probe

被引:15
作者
Chen, Chong [1 ]
Sato, Ryo [1 ]
Shimizu, Yuki [1 ]
Nakamura, Taku [1 ]
Matsukuma, Hiraku [1 ]
Gao, Wei [1 ]
机构
[1] Tohoku Univ, Dept Finemech, Precis Nanometrol Lab, Sendai, Miyagi 9808579, Japan
来源
APPLIED SCIENCES-BASEL | 2019年 / 9卷 / 03期
基金
日本学术振兴会;
关键词
chromatic confocal probe; femtosecond laser; measurement range expansion; side-lobe; LIGHT-MICROSCOPY; RESOLUTION; FABRICATION; IMPROVEMENT; REDUCTION; FIBER;
D O I
10.3390/app9030454
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
A method is proposed to expand the Z-directional measurement range of a fiber-based dual-detector chromatic confocal probe with a mode-locked femtosecond laser source. In the dual-detector chromatic confocal probe, the Z-directional displacement of a measurement target is derived from the peak wavelength in the normalized intensity ratio from the two light intensities obtained by the two identical fiber detectors. In this paper, a new method utilizing the main-lobe and side-lobes of axial responses acquired from both the normalized intensity ratio I-a and the invert normalized intensity ratio I-n, which is the inverse of I-a, is proposed to obtain the seamless relationship between the peak wavelength and the Z-directional displacement of a measurement target. Theoretical calculations and experimental investigation are carried out to demonstrate the feasibility of the proposed measurement range expansion method.
引用
收藏
页数:14
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