Deposition of Tin Oxide Thin Films by Successive Ionic Layer Adsorption Reaction Method and Its Characterization

被引：6

作者：

Raj, Shipra ^{[1
]}

Kumar, Sharad ^{[2
]}

Srivastava, Suneel Kumar ^{[2
]}

Kar, Pradip ^{[1
]}

Roy, Poulomi ^{[1
]}

机构：

[1] Birla Inst Technol, Dept Chem, Ranchi 835215, Bihar, India

[2] Indian Inst Technol, Dept Chem, Kharagpur 721302, W Bengal, India

来源：

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY | 2018年 / 18卷 / 04期

关键词：

Tin Oxide; Thin Films; SILAR; Annealing; Optical; Electrical; CHEMICAL BATH DEPOSITION; MICROSTRUCTURAL PARAMETERS; SNO2; TEMPERATURE; MOLYBDENUM; PHOTOLUMINESCENCE; DISORDER;

D O I：

10.1166/jnn.2018.14301

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Tin oxide thin films were uniformly deposited by successive ionic layer adsorption reaction (SILAR) method on glass substrates using ethylene diamine as a complexing agent. The proper annealing treatment in air converts as-deposited amorphous films into crystalline and removes defects, reducing strain in the crystal lattice. The films were characterized by X-ray diffraction (XRD), scanning electron microscope (SEM), Atomic Force Microscopy (AFM), Fourier Transform Infrared (FTIR) spectroscopy. The film shows good optical transparency in the range of 200-1000 nm wavelength and electrical resistivity decreases upon annealing.

引用

页码：2569 / 2575

页数：7

共 50 条

[31] Manganese dioxide thin films deposited by chemical bath and successive ionic layer adsorption and reaction deposition methods and their supercapacitive performance
Mane, V. J.
Malavekar, D. B.
Ubale, S. B.
Lokhande, V. C.
Lokhande, C. D.
INORGANIC CHEMISTRY COMMUNICATIONS, 2020, 115
[32] Microstructure, Morphology, and Ultraviolet Emission of Zinc Oxide Nanopolycrystalline Films by the Modified Successive Ionic Layer Adsorption and Reaction Method
Zhang, Daoli
Zhang, Jianbing
Wu, Qiming
Miao, Xiangshui
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2010, 93 (10) : 3284 - 3290
[33] Optical and structural properties of zinc oxide films with different thicknesses prepared by successive ionic layer adsorption and reaction method
Taner, Ahmet
Kul, Metin
Turan, Evren
Aybek, A. Senol
Zor, Muhsin
Taskopru, Turan
THIN SOLID FILMS, 2011, 520 (04) : 1358 - 1362
[34] Growth and characterization of tin disulfide (SnS2) thin film deposited by successive ionic layer adsorption and reaction (SILAR) technique
Deshpande, N. G.
Sagade, A. A.
Gudage, Y. G.
Lokhande, C. D.
Sharma, Ramphal
JOURNAL OF ALLOYS AND COMPOUNDS, 2007, 436 (1-2) : 421 - 426
[35] SnapFib: An easy build Arduino based tabletop prototype for thin film deposition by Successive Ionic Layer Adsorption and Reaction method
Sen Gupta, Ashoke Kumar
Adnan, Abu
Bhattacharjee, Shantanu
Das, Nipu Kumar
Matin, M. A.
Quamruzzaman, Muhammad
HARDWAREX, 2022, 12
[36] Preparation of Nanocrystalline CdS Thin Film by Successive Ionic Layer Adsorption and Reaction (SILAR) Method
Deshmukh, S. G.
Kheraj, Vipul
Panchal, A. K.
MATERIALS TODAY-PROCEEDINGS, 2018, 5 (10) : 21322 - 21327
[37] Preparation of SnS films with zinc blende structure by successive ionic layer adsorption and reaction method
Gao, Chao
Shen, Honglie
Sun, Lei
Huang, Haibin
Lu, Linfeng
Cai, Hong
MATERIALS LETTERS, 2010, 64 (20) : 2177 - 2179
[38] Automation of the successive ionic layer adsorption and reaction -SILAR- process
Valdez-Martinez, J. S.
Meneses-Arcos, M. A.
Calixto-Rodriguez, M.
Rumbo-Morales, J. Y.
Beltran-Escobar, M. A.
Villanueva-Tavira, J.
Sarmiento-Bustos, E.
REVISTA MEXICANA DE INGENIERIA QUIMICA, 2020, 19 (03): : 1351 - 1361
[39] Preparation and the growth mechanism of zinc blende structure tin sulfide films by successive ionic layer adsorption and reaction
Gao, Chao
Shen, Honglie
Wu, Tianru
Zhang, Lei
Jiang, Feng
JOURNAL OF CRYSTAL GROWTH, 2010, 312 (20) : 3009 - 3013
[40] Studies on size dependent properties of cadmium telluride thin films deposited by using successive ionic layer adsorption and reaction method
Ubale, AU
Kulkarni, DK
INDIAN JOURNAL OF PURE & APPLIED PHYSICS, 2006, 44 (03) : 254 - 259

← 1 2 3 4 5 →