Development of All-solid-state Thin-film Secondary Battery for MEMS and IoT Device

被引：5

作者：

Suzuki, A. ^{[1
]}

Sasaki, S. ^{[1
]}

Jimbo, T. ^{[1
]}

机构：

[1] ULVAC Inc, Inst Semicond & Elect Technol, Chigasaki, Kanagawa, Japan

来源：

18TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS | 2019年 / 1407卷

关键词：

STRUCTURAL-CHANGES; LITHIUM;

D O I：

10.1088/1742-6596/1407/1/012037

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

All-solid-state thin-film secondary battery (TFB) has come to recognized as one of the key enabling technologies for stand-alone MEMS/sensor devices which are indispensable for internet-of-things (IoT) solution. This paper presents on anode material development for TFB. Silicon is promising candidate to replace metallic lithium due to high heat-resistant and even high theoretical specific capacity. In this work, the effect of titanium addition on sputtered silicon electrode performance was investigated in order to improve not only mechanical damage but also resistivity.

引用

页数：4

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