Application of an Array Sensor Based on Plasma-Deposited Organic Film Coated Quartz Crystal Resonators to Monitoring Indoor Volatile Compounds

被引：14

作者：

Seyama, Michiko ^{[1
]}

Sugimoto, Iwao ^{[2
]}

Miyagi, Tomoko ^{[3
]}

机构：

[1] NTT, Microsyst Integrat Labs, Kanagawa, Japan

[2] Tokyo Univ Technol, Fac Engn, Dept Elect, Tokyo, Japan

[3] NTT, Afty Engn, Tokyo, Japan

来源：

IEEE SENSORS JOURNAL | 2002年 / 2卷 / 05期

关键词：

Atmospheric humidity - Crystal resonators - Ketones - Quartz - Semiconducting films - Volatile organic compounds;

D O I：

10.1109/JSEN.2002.804576

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The basic response ability of an array sensor based on plasma-deposited organic film-coated quartz crystal resonators (QCRs) were investigated with a view to their use for indoor air monitoring. The array of plasma-deposited organic film-coated QCRs was applied to detect and separate volatile organic compound (VOC) including alkanes, aromatic carbons, chlorocarbons, ketones, and alcohols. Then, we performed continuous monitoring tests in a real room environment (a refreshment area and a smoking area) with an array of plasma-deposited organic film-coated QCRs along with commercial sensors for indoor monitoring, a relative humidity/temperature sensor, a carbon dioxide sensor, and a three-dimensional micro-ultrasonic airflow meter. To provide a comparison, we also used commercial VOC detectors based on a photo-ionization detector and a semiconductor for indoor monitoring tests. We confirmed that the plasma-deposited organic film-coated QCRs exhibited fast pulse responses to volatile compounds in the room air along the baseline shift correlated with relative humidity changes and more sensitive responses compared with commercial organic gas detectors.

引用

页码：422 / 427

页数：6

共 21 条

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