ZnO Nanobox Luminescent Source Fabricated by Three-Dimensional Nanotemplate Pulsed-Laser Deposition

被引:10
作者
Hattori, Azusa N. [1 ]
Ichimiya, Masayoshi [2 ,3 ]
Ashida, Masaaki [2 ]
Tanaka, Hidekazu [1 ]
机构
[1] Osaka Univ, Inst Sci & Ind Res, Nanosci & Nanotechnol Ctr, Osaka 5670047, Japan
[2] Osaka Univ, Grad Sch Engn Sci, Toyonaka, Osaka 5608531, Japan
[3] Osaka Dent Univ, Dept Phys, Hirakata, Osaka 5731121, Japan
关键词
NANOSTRUCTURES; LITHOGRAPHY; NANOWIRES;
D O I
10.1143/APEX.5.125203
中图分类号
O59 [应用物理学];
学科分类号
摘要
A novel nanofabrication technique for metal oxide has been developed by combining inclined pulsed laser deposition with a three-dimensional (3D) nanotemplate prepared by nanoimprint lithography. ZnO nanobox structures with a tunable wall width of 20 to 100 nm can be successfully fabricated by controlling their alignment on a large scale. Cathodoluminescence measurements at 300 K showed an intense luminescence peak at around 380 nm corresponding to near-band-edge emission from even a single ZnO nanobox. The architecturally designed 3D ZnO nanostructures with an excellent wide-gap luminescent character should be good candidates for nanoscale device applications as a luminescent source. (C) 2012 The Japan Society of Applied Physics
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页数:3
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