Modeling Nonlinearities in MEMS Oscillators

被引：45

作者：

Agrawal, Deepak K. ^{[1
]}

Woodhouse, Jim ^{[1
]}

Seshia, Ashwin A. ^{[1
]}

机构：

[1] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England

来源：

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 2013年 / 60卷 / 08期

基金：

英国工程与自然科学研究理事会;

关键词：

FREQUENCY; NOISE;

D O I：

10.1109/TUFFC.2013.2747

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

We present a mathematical model of a microelectromechanical system (MEMS) oscillator that integrates the nonlinearities of the MEMS resonator and the oscillator circuitry in a single numerical modeling environment. This is achieved by transforming the conventional nonlinear mechanical model into the electrical domain while simultaneously considering the prominent nonlinearities of the resonator. The proposed nonlinear electrical model is validated by comparing the simulated amplitude-frequency response with measurements on an open-loop electrically addressed flexural silicon MEMS resonator driven to large motional amplitudes. Next, the essential nonlinearities in the oscillator circuit are investigated and a mathematical model of a MEMS oscillator is proposed that integrates the nonlinearities of the resonator. The concept is illustrated for MEMS transimpedance-amplifier-based square-wave and sine-wave oscillators. Closed-form expressions of steady-state output power and output frequency are derived for both oscillator models and compared with experimental and simulation results, with a good match in the predicted trends in all three cases.

引用

页码：1646 / 1659

页数：14

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