Nonlinear errors induced by intermodulation in heterodyne laser interferometers

被引：11
|
作者：
Fu, Haijin [1 ,2 ]
Hu, Pengcheng [1 ]
Tan, Jiubin [1 ]
Fan, Zhigang [2 ]
机构：
[1] Harbin Inst Technol, Ultra Precis Optoelect Instrument Engn Ctr, Harbin 150001, Peoples R China
[2] Harbin Inst Technol, Postdoctoral Res Stn Opt Engn, Harbin 150001, Peoples R China
来源：
OPTICS LETTERS | 2017年 / 42卷 / 03期
基金：
中国博士后科学基金; 中国国家自然科学基金;
关键词：
OPTICAL INTERFEROMETRY; PERIODIC ERROR; COMPENSATION; LENGTH;
D O I：
10.1364/OL.42.000427
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A striking abnormal harmonic is detected in the measurement signal spectrum of a heterodyne laser interferometer, which deviates from the conventional frequency-domain model. A nonlinearity model based on intermodulation is proposed to explain this abnormality and to analyze its influence. Analysis from this model demonstrates that the harmonics arising from intermodulation can result in not only nonlinear errors opposite in sign to the traditional first-and second-order nonlinearities, but also new third-and fourth-order nonlinearities; moreover, these periodic nonlinearities cannot be fully compensated anymore by the Heydemann correction. (C) 2017 Optical Society of America
引用
收藏
页码：427 / 430
页数：4
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