Design and simulation of a 2-DOF parallel linear precision platform utilizing piezoelectric impact drive mechanism

被引：4

作者：

Pan, Chengliang ^{[1
]}

Zhang, Ting ^{[1
]}

Dai, Tianliang ^{[1
]}

Han, Liling ^{[1
]}

Xia, Haojie ^{[1
]}

Yu, Liandong ^{[1
]}

机构：

[1] Hefei Univ Technol, Sch Instrument Sci & Optoelect Engn, Hefei 230009, Anhui, Peoples R China

来源：

TENTH INTERNATIONAL SYMPOSIUM ON PRECISION ENGINEERING MEASUREMENTS AND INSTRUMENTATION | 2019年 / 11053卷

基金：

中国国家自然科学基金;

关键词：

precision platform; piezoelectric; impact drive mechanism; FRICTION;

D O I：

10.1117/12.2512795

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

With rapid developments of micro/nano science and technology, precision platforms are widely required in the research and industry fields. This paper presents a 2-DOF parallel linear precision platform utilizing piezoelectric impact drive mechanism. With symmetrical flexible structure and specific piezoelectric driving manner, effective and decoupled actuation of the stator is achieved. FEA simulations are conducted to investigate the characteristics of the stator. With established dynamic model of the platform, motion responses of stator and slider in the two directions are simulated and analyzed. With simultaneous actuation of the 2-DOF motions, a motion interaction phenomenon is raised and discussed.

引用

页数：8

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