Switching Vertical to Horizontal Graphene Growth Using Faraday Cage-Assisted PECVD Approach for High-Performance Transparent Heating Device

被引:97
作者
Qi, Yue [1 ]
Deng, Bing [1 ]
Guo, Xiao [2 ]
Chen, Shulin [3 ]
Gao, Jing [4 ]
Li, Tianran [1 ]
Dou, Zhipeng [3 ]
Ci, Haina [1 ]
Sun, Jingyu [5 ]
Chen, Zhaolong [1 ]
Wang, Ruoyu [1 ]
Cui, Lingzhi [1 ]
Chen, Xudong [1 ]
Chen, Ke [1 ]
Wang, Huihui [1 ]
Wang, Sheng [2 ]
Gao, Peng [3 ]
Rummeli, Mark H. [6 ]
Peng, Hailin [1 ,7 ]
Zhang, Yanfeng [1 ,7 ,8 ]
Liu, Zhongfan [1 ,7 ]
机构
[1] Peking Univ, Coll Chem & Mol Engn, Beijing Natl Lab Mol Sci, Ctr Nanochem CNC,Acad Adv Interdisciplinary Studi, Beijing 100871, Peoples R China
[2] Peking Univ, Dept Elect, Key Lab Phys & Chem Nanodevices, Beijing 100871, Peoples R China
[3] Peking Univ, Ctr Nanochem CNC, Sch Phys, Electron Microscopy Lab, Beijing 100871, Peoples R China
[4] Soochow Univ, Inst Funct Nano & Soft Mat FUNSOM, Suzhou 215006, Jiangsu, Peoples R China
[5] Soochow Univ, Soochow Inst Energy & Mat Innovat SIEMIS, Key Lab Adv Carbon Mat & Wearable Energy Technol, Suzhou 215006, Jiangsu, Peoples R China
[6] Soochow Univ, Coll Phys Optoelect & Energy, Sch Energy, Soochow Inst Energy & Mat Innovat SIEMIS, Suzhou 215006, Jiangsu, Peoples R China
[7] Beijing Graphene Inst, Beijing 100095, Peoples R China
[8] Peking Univ, Coll Engn, Dept Mat Sci & Engn, Beijing 100871, Peoples R China
基金
中国国家自然科学基金; 中国博士后科学基金;
关键词
Faraday cages; laid-down graphene; plasma-enhanced chemical vapor deposition; vertical graphene; CHEMICAL-VAPOR-DEPOSITION; CARBON NANOWALLS; FILMS; PLASMAS; GLASSES; ELECTRODES; NANOSHEETS; MECHANISM; SAPPHIRE;
D O I
10.1002/adma.201704839
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Plasma-enhanced chemical vapor deposition (PECVD) is an applicable route to achieve low-temperature growth of graphene, typically shaped like vertical nanowalls. However, for transparent electronic applications, the rich exposed edges and high specific surface area of vertical graphene (VG) nanowalls can enhance the carrier scattering and light absorption, resulting in high sheet resistance and low transmittance. Thus, the synthesis of laid-down graphene (LG) is imperative. Here, a Faraday cage is designed to switch graphene growth in PECVD from the vertical to the horizontal direction by weakening ion bombardment and shielding electric field. Consequently, laid-down graphene is synthesized on low-softening-point soda-lime glass (6 cm x 10 cm) at approximate to 580 degrees C. This is hardly realized through the conventional PECVD or the thermal chemical vapor deposition methods with the necessity of high growth temperature (1000 degrees C-1600 degrees C). Laid-down graphene glass has higher transparency, lower sheet resistance, and much improved macroscopic uniformity when compare to its vertical graphene counterpart and it performs better in transparent heating devices. This will inspire the next-generation applications in low-cost transparent electronics.
引用
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页数:9
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