Precise rotary motor by inchworm motion using dual wrap belts

被引:24
作者
Kim, SC [1 ]
Kim, SH [1 ]
机构
[1] Korea Adv Inst Sci & Technol, Dept Mech Engn, Taejon 305701, South Korea
关键词
D O I
10.1063/1.1149789
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A new type of rotary motor by inchworm motion using two belts is developed. A rotor is wrapped by two opposite belts which are connected to piezoelectric actuators. A serial lever structure with flexure hinges is used to connect a belt and piezoelectric actuators. The lever structure amplifies micro displacement of a piezoelectric actuator. A rotational motion with the step size of 2.36 mu rad is obtained through this work. An angular step size can be further reduced by increasing the rotor radius. We present a analysis model of the motor for a design of a similar precise motor. (C) 1999 American Institute of Physics. [S0034-6748(99)04004-6].
引用
收藏
页码:2546 / 2550
页数:5
相关论文
共 24 条
[1]   CHARACTERIZATION OF AN INCHWORM PROTOTYPE MOTOR [J].
BEXELL, M ;
TIENSUU, AL ;
SCHWEITZ, JA ;
SODERKVIST, J ;
JOHANSSON, S .
SENSORS AND ACTUATORS A-PHYSICAL, 1994, 43 (1-3) :322-329
[2]   SIMPLE 2-DIMENSIONAL PIEZOELECTRIC MICROPOSITIONER FOR A SCANNING TUNNELING MICROSCOPE [J].
BLACKFORD, BL ;
JERICHO, MH .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (01) :182-184
[3]   A NEW-TYPE OF LINEAR PIEZOELECTRIC STEPPER MOTOR [J].
DONG, SX ;
LI, LT ;
GUI, ZL ;
ZHOU, TY ;
ZHANG, XW .
IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY PART A, 1995, 18 (02) :257-260
[4]  
DUONG K, 1995, P SOC PHOTO-OPT INS, V2443, P782, DOI 10.1117/12.208315
[5]  
GOTO H, 1988, B JPN SOC PREC ENG, V22, P277
[6]   ULTRAHIGH-VACUUM ATOMIC-FORCE MICROSCOPE USING A PANTOGRAPH INCHWORM MECHANISM [J].
HOSAKA, S ;
HONDA, Y ;
HASEWAGA, T ;
YAMAMOTO, T ;
KONDO, M .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1993, 64 (12) :3524-3529
[7]   NANOMETER-SCALE INSTABILITY AT SLIDING INTERFACES - TRIBOLOGICAL CONSIDERATIONS IN SCANNING TUNNELING MICROSCOPY [J].
JONES, LA ;
THOMAS, DF .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1992, 10 (04) :636-640
[8]   A LINEAR PIEZOELECTRIC STEPPER MOTOR WITH SUBMICROMETER STEP SIZE AND CENTIMETER TRAVEL RANGE [J].
JUDY, JW ;
POLLA, DL ;
ROBBINS, WP .
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1990, 37 (05) :428-437
[9]   DESIGN AND 3-DIMENSIONAL CALIBRATION OF A MEASURING SCANNING TUNNELING MICROSCOPE FOR METROLOGICAL APPLICATIONS [J].
JUSKO, O ;
ZHAO, X ;
WOLFF, H ;
WILKENING, G .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (08) :2514-2518
[10]   Miniature three-axis micropositioner for scanning proximal probe and other applications [J].
Kleindiek, S ;
Kim, HS ;
Kratschmer, E ;
Chang, THP .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (06) :2653-2656