Precise rotary motor by inchworm motion using dual wrap belts

被引:23
作者
Kim, SC [1 ]
Kim, SH [1 ]
机构
[1] Korea Adv Inst Sci & Technol, Dept Mech Engn, Taejon 305701, South Korea
关键词
D O I
10.1063/1.1149789
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A new type of rotary motor by inchworm motion using two belts is developed. A rotor is wrapped by two opposite belts which are connected to piezoelectric actuators. A serial lever structure with flexure hinges is used to connect a belt and piezoelectric actuators. The lever structure amplifies micro displacement of a piezoelectric actuator. A rotational motion with the step size of 2.36 mu rad is obtained through this work. An angular step size can be further reduced by increasing the rotor radius. We present a analysis model of the motor for a design of a similar precise motor. (C) 1999 American Institute of Physics. [S0034-6748(99)04004-6].
引用
收藏
页码:2546 / 2550
页数:5
相关论文
共 24 条
  • [1] CHARACTERIZATION OF AN INCHWORM PROTOTYPE MOTOR
    BEXELL, M
    TIENSUU, AL
    SCHWEITZ, JA
    SODERKVIST, J
    JOHANSSON, S
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 1994, 43 (1-3) : 322 - 329
  • [2] SIMPLE 2-DIMENSIONAL PIEZOELECTRIC MICROPOSITIONER FOR A SCANNING TUNNELING MICROSCOPE
    BLACKFORD, BL
    JERICHO, MH
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (01) : 182 - 184
  • [3] A NEW-TYPE OF LINEAR PIEZOELECTRIC STEPPER MOTOR
    DONG, SX
    LI, LT
    GUI, ZL
    ZHOU, TY
    ZHANG, XW
    [J]. IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY PART A, 1995, 18 (02): : 257 - 260
  • [4] DUONG K, 1995, P SOC PHOTO-OPT INS, V2443, P782, DOI 10.1117/12.208315
  • [5] GOTO H, 1988, B JPN SOC PREC ENG, V22, P277
  • [6] ULTRAHIGH-VACUUM ATOMIC-FORCE MICROSCOPE USING A PANTOGRAPH INCHWORM MECHANISM
    HOSAKA, S
    HONDA, Y
    HASEWAGA, T
    YAMAMOTO, T
    KONDO, M
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1993, 64 (12) : 3524 - 3529
  • [7] NANOMETER-SCALE INSTABILITY AT SLIDING INTERFACES - TRIBOLOGICAL CONSIDERATIONS IN SCANNING TUNNELING MICROSCOPY
    JONES, LA
    THOMAS, DF
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1992, 10 (04): : 636 - 640
  • [8] A LINEAR PIEZOELECTRIC STEPPER MOTOR WITH SUBMICROMETER STEP SIZE AND CENTIMETER TRAVEL RANGE
    JUDY, JW
    POLLA, DL
    ROBBINS, WP
    [J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1990, 37 (05) : 428 - 437
  • [9] DESIGN AND 3-DIMENSIONAL CALIBRATION OF A MEASURING SCANNING TUNNELING MICROSCOPE FOR METROLOGICAL APPLICATIONS
    JUSKO, O
    ZHAO, X
    WOLFF, H
    WILKENING, G
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (08) : 2514 - 2518
  • [10] Miniature three-axis micropositioner for scanning proximal probe and other applications
    Kleindiek, S
    Kim, HS
    Kratschmer, E
    Chang, THP
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (06): : 2653 - 2656