Ion exchange in glass using femtosecond laser irradiation

被引:92
作者
Kanehira, Shingo [1 ]
Miura, Kiyotaka [2 ]
Hirao, Kazuyuki [2 ]
机构
[1] Kyoto Univ, Innovat Collaborat Ctr, Nishikyo Ku, Kyoto 6158510, Japan
[2] Kyoto Univ, Dept Chem Mat, Grad Sch Engn, Nishikyo Ku, Kyoto 6158510, Japan
关键词
D O I
10.1063/1.2959820
中图分类号
O59 [应用物理学];
学科分类号
摘要
We explain the occurrence of ion exchange and an index profile around the focal point inside a commercial crown glass formed by femtosecond laser irradiation. The index profile in the photoinduced area has a ring-shaped pattern, which indicates that local densification occurred in the glass. An irregular surface reflecting the density distribution is formed around the focal point by dry etching process using a focused ion beam. By the irradiation of femtosecond laser pulses, the effect of ion exchange between the focal point and the surrounding area is also observed in the area in which local densification occurred. (C) 2008 American Institute of Physics.
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页数:3
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