Correcting scanning instabilities from images of periodic structures

被引：31
作者：
Braidy, Nadi [1 ]
Le Bouar, Yann [2 ]
Lazar, Sorin [3 ,4 ]
Ricolleau, Christinan [5 ]
机构：
[1] Univ Sherbrooke, Dept Genie Chim & Genie Biotechnol, Sherbrooke, PQ J1H 2R1, Canada
[2] CNRS Onera, Lab Etud Microstruct, F-92322 Chatillon, France
[3] FEI Electron Opt, NL-5600 KA Eindhoven, Netherlands
[4] McMaster Univ, Dept Mat Sci & Engn, Hamilton, ON L8S 4M1, Canada
[5] Univ Paris Diderot, Lab Mat & Phenomenes Quant, CNRS UMR 7162, F-75205 Paris 13, France
来源：
ULTRAMICROSCOPY | 2012年 / 118卷
基金：
加拿大自然科学与工程研究理事会;
关键词：
Scanning probe transmission microcopy; High-angle annular dark field; Scanning instability; Lattice image; Fourier transform; Restoration technique; Streaking; Flagging; Skipping; MICROSCOPY;
D O I：
10.1016/j.ultramic.2012.04.001
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
A method for measuring and correcting the row displacement errors in lattice images acquired using scanning based methods is presented. This type of distortion is apparent in lattice-resolved images acquired using scanning-based techniques such as scanning transmission electron microscopy (STEM) and translates to vertical streaks convolving every feature in Fourier space. This paper presents a method to measure and correct the distortion based on the phase analysis of the streaks in Fourier space. The validity and the precision of the method is demonstrated using a model image and two experimental STEM images of Si < 110 > thin film and a 5 nm CoPt disordered nanocrystal. The algorithm is implemented in a freely available Digital Micrograph (TM) script. (C) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码：67 / 76
页数：10
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