Correcting scanning instabilities from images of periodic structures

被引：32

作者：

Braidy, Nadi ^{[1
]}

Le Bouar, Yann ^{[2
]}

Lazar, Sorin ^{[3
,4
]}

Ricolleau, Christinan ^{[5
]}

机构：

[1] Univ Sherbrooke, Dept Genie Chim & Genie Biotechnol, Sherbrooke, PQ J1H 2R1, Canada

[2] CNRS Onera, Lab Etud Microstruct, F-92322 Chatillon, France

[3] FEI Electron Opt, NL-5600 KA Eindhoven, Netherlands

[4] McMaster Univ, Dept Mat Sci & Engn, Hamilton, ON L8S 4M1, Canada

[5] Univ Paris Diderot, Lab Mat & Phenomenes Quant, CNRS UMR 7162, F-75205 Paris 13, France

来源：

ULTRAMICROSCOPY | 2012年 / 118卷

基金：

加拿大自然科学与工程研究理事会;

关键词：

Scanning probe transmission microcopy; High-angle annular dark field; Scanning instability; Lattice image; Fourier transform; Restoration technique; Streaking; Flagging; Skipping; MICROSCOPY;

D O I：

10.1016/j.ultramic.2012.04.001

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

A method for measuring and correcting the row displacement errors in lattice images acquired using scanning based methods is presented. This type of distortion is apparent in lattice-resolved images acquired using scanning-based techniques such as scanning transmission electron microscopy (STEM) and translates to vertical streaks convolving every feature in Fourier space. This paper presents a method to measure and correct the distortion based on the phase analysis of the streaks in Fourier space. The validity and the precision of the method is demonstrated using a model image and two experimental STEM images of Si < 110 > thin film and a 5 nm CoPt disordered nanocrystal. The algorithm is implemented in a freely available Digital Micrograph (TM) script. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：67 / 76

页数：10

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