Fluid dynamics calculation of sputtering from a cylindrical thermal spike

被引:61
作者
Jakas, MM [1 ]
Bringa, EM
Johnson, RE
机构
[1] Univ La Laguna, Dept Fis Fundamental & Expt, Tenerife 38201, Spain
[2] Univ Virginia, Charlottesville, VA 22903 USA
关键词
D O I
10.1103/PhysRevB.65.165425
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The sputtering yield Y from a cylindrical thermal spike is calculated using a two-dimensional fluid-dynamics model which includes the transport of energy, momentum, and mass. The results show that the high pressure built up within the spike causes the hot core to perform a rapid expansion both laterally and upwards. This expansion appears to play a significant role in the sputtering process. It is responsible for the ejection of mass from the surface and causes fast cooling of the cascade. The competition between these effects accounts for the nearly linear dependence of Y with the deposited energy per unit depth that was observed in recent molecular-dynamics simulations. Based on this we describe the conditions for attaining a linear yield at high excitation densities and give a simple model for this yield.
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收藏
页码:1654251 / 1654259
页数:9
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