HIGHLY SENSITIVE AND INTEGRATED VOC SENSOR BASED ON SILICON NANOPHOTONICS

被引：0
作者：
Li, Z. Y.
Zhang, G.
Yang, Z. C.
Hao, Y. L.
Jin, Y. F.
Lin, A. O.
机构：
来源：
2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2017年
基金：
中国国家自然科学基金;
关键词：
Silicon Photonic; Sensor; Ring Resonator; Volatile Organic Compounds;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
An integrated volatile organic compounds (VOC) sensor based on silicon photonic ring resonator system is presented in this paper. A thin absorption layer is coated on the silicon surface required to selectively trap the target gas and response as refractive index change. This acts as the main sensing unit, which subsequently affect the resonance peak position. The relative high sensitivity (1.7 pm/1000 ppm for acetone), high stability (<1 pm drift) and fast response time (similar to 20 s) make it a perfect candidate for VOC safety monitoring and warning.
引用
收藏
页码：1479 / 1482
页数：4
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