Analysis of Noise Tolerance for High Precision Tilting Measurement Algorithm of Moving Mirror in Fourier Transform Infrared Spectrometer

被引：1
作者：
Sun Xiaojie [1 ,2 ]
Mao Jianhua [3 ]
Dai Zuoxiao [1 ]
Xia Xiang [1 ,2 ]
Li Tao [1 ,2 ]
Wang Zhirui [1 ,2 ]
机构：
[1] Chinese Acad Sci, Shanghai Inst Tech Phys, Shanghai 200083, Peoples R China
[2] BGraduate Univ Chinese Acad Sci, \\ Beijing 100049, Peoples R China
[3] CShanghai Inst Phys Educ, Shanghai CHINA200433, Peoples R China
来源：
6TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: OPTICAL SYSTEM TECHNOLOGIES FOR MANUFACTURING AND TESTING | 2012年 / 8420卷
关键词：
Fourier Transform Infrared Spectrometer; dynamic tilting angle; moving mirror; dynamic alignment; MISALIGNMENT;
D O I：
10.1117/12.975181
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Dynamic alignment system (DAS) is used to correct the misalignment of moving mirror in Fourier Transform Infrared Spectrometer (FTIRS) of which both fixed mirror and moving mirror are plane reflectors. The detecting precision of dynamic tilting angle of moving mirror offers guarantees to the adjustment performances of DAS. In this paper, the noise tolerance of measuring precision of tilting caused by moving mirror are theoretically analyzed and tested. Experimental results show that tilting measuring accuracy is improved with adjusting methods according to the noise tolerance analysis.
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页数：6
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