Thermo-optic and Elasto-optic Tuning of Silicon Nanowires

被引：0

作者：

Amthor, J. ^{[1
]}

Horn, O. ^{[1
]}

Lipka, T. ^{[1
]}

Mueller, J. ^{[1
]}

机构：

[1] Hamburg Univ Technol, D-21073 Hamburg, Germany

来源：

PHOTONIC MATERIALS, DEVICES, AND APPLICATIONS III | 2009年 / 7366卷

关键词：

SOI photonic; nanowires; tunable; thermo-optic; elasto-optic; WAVE-GUIDES;

D O I：

10.1117/12.821698

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In this work a thermo-optic switch with very low power consumption of less than 1 mW is presented. The switch consists of a Mach-Zehnder-Interferometer whose arms are placed on free-standing SiO2-membrane cantilevers. The waveguides are monomode nanowires fabricated by DUV-contact lithography having losses of 2 dB/cm. Additionally, a membrane-system to tune the nanowires elasto-optically is shown.

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页数：8

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