Physical mechanism of performance adjustment in selective buried oxide n-MOSFETs

被引:1
作者
Huang, Qin [1 ]
Liu, Renhua [1 ]
Sun, Yabin [1 ]
Li, Xiaojin [1 ]
Shi, Yanling [1 ]
Wang, Changfeng [2 ]
Liao, Duanduan [2 ]
Tian, Ming [2 ]
机构
[1] East China Normal Univ, Dept Elect Engn, Key Lab Multidimens Informat Proc, Shanghai 200241, Peoples R China
[2] Shanghai Huali Microelect Corp, Shanghai 201203, Peoples R China
基金
中国国家自然科学基金;
关键词
D O I
10.1007/s11432-018-9791-2
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
引用
收藏
页数:3
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