This paper deals with the sterilization of PET bottles using capacitive coupled radio frequency (CCP) and microwave (MW) plasma sources operated at different external parameter settings. Gases like argon, oxygen, hydrogen, helium, nitrogen, etc. and various spores and germs such as B. subtilis, B. stearothermophilus, A. niger and S. cerevisiae have been used in the plasma processes. Langmuir probe measurements were carried out at different choosen external parameter values and the resulted plasma parameters have been correlated to the different killing rates of spores. In the present investigation, we have been reduced the spores by 6 decades with in 10 sec.