Effects of active element Ti on interfacial microstructure and bonding strength of SiO2/SiO2 joints soldered using Sn3.5Ag4Ti(Ce,Ga) alloy filler

被引:22
作者
Cheng, L. X. [1 ]
Liu, M. R. [2 ]
Wang, X. Q. [3 ]
Yan, B. H. [1 ]
Li, G. Y. [4 ]
机构
[1] South China Agr Univ, Coll Elect Engn, Guangzhou 510642, Guangdong, Peoples R China
[2] Hunan Normal Univ, Coll Phys & Informat Sci, Changsha 410081, Hunan, Peoples R China
[3] China Elect Prod Reliabil & Environm Testing Res, Guangzhou 510610, Guangdong, Peoples R China
[4] South China Univ Technol, Sch Elect & Informat Engn, Guangzhou 510641, Guangdong, Peoples R China
来源
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING | 2017年 / 680卷
关键词
Intermetallics; Bonding; Interfaces; Fracture; 6061; AL;
D O I
10.1016/j.msea.2016.10.080
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The active bonding between Sn3.5Ag4Ti(Ce, Ga) and silicon dioxide at low temperature has been investigated. The microstructure of the bonding interface, the distribution of Ti near the interface, and the formation of the interfacial reaction products have been explored. Experiment results show that there is obvious segregation of Ti at the SiO2/solder interface, and TiSi and TiO2 phases are formed at the interface. The mechanism of active bonding between Sn3.5Ag4Ti(Ce, Ga) and silicon dioxide has been analyzed based on the active adsorption and reaction thermodynamics theories. A soldering dynamic process model is established to better understand the soldering process. Both theoretical and experimental results suggest that the chemical adsorption of Ti on the silicon dioxide interface plays an important role in the initial bonding stage. The main bonding mechanism might be the reactant formation due to the interfacial reaction between Sn3.5Ag4Ti(Ce, Ga) solder and SiO2 substrate. The shear strength of SiO2/SiO2 joints is measured to be 11.15 MPa, 14.10 MPa, 16.37 MPa, and 17.91 MPa with soldering time of 1 min, 15 min, 30 min, and 60 min, respectively, which meets the requirements of SiOz or glass substrates bonding application.
引用
收藏
页码:317 / 323
页数:7
相关论文
共 18 条
[1]  
Braeuer J., 2012, SENSOR ACTUAT A-PHYS, V188, P263
[2]   Active soldering of ZnS-SiO2 sputtering targets to copper backing plates using an Sn3.5Ag4Ti(Ce, Ga) filler metal [J].
Chang, S. Y. ;
Chuang, T. H. ;
Tsao, L. C. ;
Yang, C. L. ;
Yang, Z. S. .
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2008, 202 (1-3) :22-26
[3]  
Chang S. Y., J ELECT MAT, V36
[4]   Active soldering of indium tin oxide (ITO) with Cu in air using an Sn3.5Ag4Ti(Ce, Ga) filler [J].
Chang, SY ;
Tsao, LC ;
Chiang, MJ ;
Tung, CN ;
Pan, GH ;
Chuang, TH .
JOURNAL OF MATERIALS ENGINEERING AND PERFORMANCE, 2003, 12 (04) :383-389
[5]   Effects of titanium on active bonding between Sn3.5Ag4Ti(Ce,Ga) alloy filler and alumina [J].
Cheng, L. X. ;
Li, G. Y. ;
Li, Z. L. ;
Wu, Z. Z. ;
Zhou, B. .
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2015, 26 (08) :6004-6012
[6]   Solidification and interfacial interactions in gold-tin system during eutectic or thermo-compression bonding for 200 mm MEMS wafer level hermetic packaging [J].
Garnier, Arnaud ;
Baillin, Xavier ;
Hodaj, Fiqiri .
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2013, 24 (12) :5000-5013
[7]   Energetics of metal/ceramic interfaces, metal-semiconductor Schottky contacts, and their relationship [J].
Li, JG .
MATERIALS CHEMISTRY AND PHYSICS, 1997, 47 (2-3) :126-145
[8]   Laser-heating wire bonding on MEMS packaging [J].
Liu, Yuetao ;
Sun, Lining .
AIP ADVANCES, 2014, 4 (03)
[9]   Low temperature transient liquid phase bonding of Au/Sn and Cu/Sn electroplated material systems for MEMS wafer-level packaging [J].
Marauska, S. ;
Claus, M. ;
Lisec, T. ;
Wagner, B. .
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2013, 19 (08) :1119-1130
[10]   Wafer bonding techniques for MEMS [J].
Miki, N .
SENSOR LETTERS, 2005, 3 (04) :263-273