We review recent developments in the epitaxial integration of multifunctional oxide thin film heterostructures on silicon (Si). Perovskite oxides have been extensively studied for use in multifunctional devices due to a wide range of functional properties. To realize multifunctional oxide devices, these multifunctional films should be integrated directly on Si, maintaining high crystalline quality. Molecular beam epitaxy growth of epitaxial SrTiO3 (STO) on Si provides a template for incorporating the epitaxial oxide films on Si. However, the dissimilar physical nature of Si from most oxide materials influences the properties of oxide films on Si, especially with regard to structural defects and thermal strains. Therefore, in this review, we present a comprehensive overview of epitaxial integration of various model oxide systems on Si, addressing how STO/Si can be used to explore the novel phenomenon of oxide heterostructures as well as to realize multifunctional devices. (c) 2012 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
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Cornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Warusawithana, Maitri P.
Cen, Cheng
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Univ Pittsburgh, Dept Phys & Astron, Pittsburgh, PA 15260 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Cen, Cheng
Sleasman, Charles R.
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Univ Pittsburgh, Dept Phys & Astron, Pittsburgh, PA 15260 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Sleasman, Charles R.
Woicik, Joseph C.
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NIST, Gaithersburg, MD 20899 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Woicik, Joseph C.
Li, Yulan
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Penn State Univ, Dept Mat Sci & Engn, University Pk, PA 16802 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Li, Yulan
Kourkoutis, Lena Fitting
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Cornell Univ, Sch Appl & Engn Phys, Ithaca, NY 14853 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Kourkoutis, Lena Fitting
Klug, Jeffrey A.
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Northwestern Univ, Dept Phys & Astron, Evanston, IL 60208 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Klug, Jeffrey A.
Li, Hao
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Motorola Inc, Appl Res & Technol Ctr, Tempe, AZ 85284 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Li, Hao
Ryan, Philip
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Ames Lab, Ames, IA 50011 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Ryan, Philip
Wang, Li-Peng
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Intel Corp, Santa Clara, CA 95052 USA
TricornTech, San Jose, CA 95129 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Wang, Li-Peng
Bedzyk, Michael
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Northwestern Univ, Dept Phys & Astron, Evanston, IL 60208 USA
Northwestern Univ, Dept Mat Sci & Engn, Evanston, IL 60208 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Bedzyk, Michael
Muller, David A.
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Cornell Univ, Sch Appl & Engn Phys, Ithaca, NY 14853 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Muller, David A.
Chen, Long-Qing
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Penn State Univ, Dept Mat Sci & Engn, University Pk, PA 16802 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Chen, Long-Qing
Levy, Jeremy
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Univ Pittsburgh, Dept Phys & Astron, Pittsburgh, PA 15260 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Levy, Jeremy
Schlom, Darrell G.
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Cornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
机构:
Cornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Warusawithana, Maitri P.
Cen, Cheng
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h-index: 0
机构:
Univ Pittsburgh, Dept Phys & Astron, Pittsburgh, PA 15260 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Cen, Cheng
Sleasman, Charles R.
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h-index: 0
机构:
Univ Pittsburgh, Dept Phys & Astron, Pittsburgh, PA 15260 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Sleasman, Charles R.
Woicik, Joseph C.
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h-index: 0
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NIST, Gaithersburg, MD 20899 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Woicik, Joseph C.
Li, Yulan
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h-index: 0
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Penn State Univ, Dept Mat Sci & Engn, University Pk, PA 16802 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Li, Yulan
Kourkoutis, Lena Fitting
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h-index: 0
机构:
Cornell Univ, Sch Appl & Engn Phys, Ithaca, NY 14853 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Kourkoutis, Lena Fitting
Klug, Jeffrey A.
论文数: 0引用数: 0
h-index: 0
机构:
Northwestern Univ, Dept Phys & Astron, Evanston, IL 60208 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Klug, Jeffrey A.
Li, Hao
论文数: 0引用数: 0
h-index: 0
机构:
Motorola Inc, Appl Res & Technol Ctr, Tempe, AZ 85284 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Li, Hao
Ryan, Philip
论文数: 0引用数: 0
h-index: 0
机构:
Ames Lab, Ames, IA 50011 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Ryan, Philip
Wang, Li-Peng
论文数: 0引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95052 USA
TricornTech, San Jose, CA 95129 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Wang, Li-Peng
Bedzyk, Michael
论文数: 0引用数: 0
h-index: 0
机构:
Northwestern Univ, Dept Phys & Astron, Evanston, IL 60208 USA
Northwestern Univ, Dept Mat Sci & Engn, Evanston, IL 60208 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Bedzyk, Michael
Muller, David A.
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h-index: 0
机构:
Cornell Univ, Sch Appl & Engn Phys, Ithaca, NY 14853 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Muller, David A.
Chen, Long-Qing
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h-index: 0
机构:
Penn State Univ, Dept Mat Sci & Engn, University Pk, PA 16802 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Chen, Long-Qing
Levy, Jeremy
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h-index: 0
机构:
Univ Pittsburgh, Dept Phys & Astron, Pittsburgh, PA 15260 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Levy, Jeremy
Schlom, Darrell G.
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h-index: 0
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Cornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA