Growth and characterization of periodically polarity-inverted ZnO structures on sapphire substrates

被引：2
|
作者：
Park, Jinsub [1 ]
Yao, Takafumi [2 ]
机构：
[1] Hanyang Univ, Dept Elect Engn, Seoul 133791, South Korea
[2] Tohoku Univ, Interdisciplinary Res Ctr, Sendai, Miyagi 980855, Japan
来源：
MATERIALS RESEARCH BULLETIN | 2012年 / 47卷 / 10期
关键词：
Semiconductor; Thin films; Epitaxial growth; Atomic force microscopy;
D O I：
10.1016/j.materresbull.2012.04.044
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We report on the fabrication and characterization of periodically polarity inverted (PPI) ZnO heterostructures on (0 0 0 1) Al2O3 substrates. For the periodically inverted array of ZnO polarity, CrN and Cr2O3 polarity selection buffer layers are used for the Zn- and O-polar ZnO films, respectively. The change of polarity and period in fabricated ZnO structures is evaluated by diffraction patterns and polarity sensitive piezo-response microscopy. Finally, PPI ZnO structures with subnanometer scale period are demonstrated by using holographic lithography and regrowth techniques. (C) 2012 Elsevier Ltd. All rights reserved.
引用
收藏
页码：2875 / 2878
页数：4
相关论文
共 50 条
  • [1] Optical characterization of periodically polarity-inverted ZnO structures on (0001) Al2O3 substrates
    Park, Jinsub
    Lee, Woong
    Ha, Jun-Seok
    Kwon, Min-Ki
    Lee, Hyo-Jong
    CURRENT APPLIED PHYSICS, 2013, 13 (07) : 1213 - 1217
  • [2] Fabrication of periodically polarity-inverted ZnO films
    Minegishi, T.
    Ishizawa, A.
    Kim, J.
    Kim, D.
    Ahn, S.
    Park, S.
    Park, J.
    Im, I.
    Oh, D. C.
    Nakano, H.
    Fujii, K.
    Jeon, H.
    Yao, T.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2008, 26 (03): : 1120 - 1123
  • [3] Ultraviolet stimulated emission in periodically polarity-inverted ZnO structures at room temperature
    Park, Jinsub
    Goto, Takenari
    Park, Sung Hyun
    Ha, Jun-Seok
    Yoon, Euijoon
    Yao, Takafumi
    APPLIED PHYSICS LETTERS, 2010, 97 (17)
  • [4] Fabrication of periodically polarity-inverted ZnO structures on (0001) Al2O3
    Park, J. S.
    Minegishi, T.
    Ahn, S.
    Park, S. H.
    Hong, S. K.
    Jeon, H.
    Im, I. H.
    Chang, J. H.
    Yao, T.
    THIN SOLID FILMS, 2010, 518 (15) : 4117 - 4120
  • [5] Lateral arrays of vertical ZnO nanowalls on a periodically polarity-inverted ZnO template
    Lee, Sang Hyun
    Minegishi, Tsutomu
    Ha, Jun-Seok
    Park, Jin-sub
    Lee, Hyo-Jong
    Lee, Hyun Jung
    Shiku, Hitoshi
    Matsue, Tomokazu
    Hong, Soon-Ku
    Jeon, Heonsu
    Yao, Takafumi
    NANOTECHNOLOGY, 2009, 20 (23)
  • [6] Anisotropic properties of periodically polarity-inverted zinc oxide structures
    Park, J. S.
    Minegishi, T.
    Lee, J. W.
    Hong, S. K.
    Song, J. H.
    Lee, J. Y.
    Yoon, E.
    Yao, T.
    JOURNAL OF APPLIED PHYSICS, 2010, 107 (12)
  • [7] Ordered arrays of ZnO nanorods grown on periodically polarity-inverted surfaces
    Lee, Sang Hyun
    Minegishi, Tsutomu
    Park, Jin Sub
    Park, Seung Hwan
    Ha, Jun-Seok
    Lee, Hyo-Jong
    Lee, Hyun-Jae
    Ahn, Sungmo
    Kim, Jaehoon
    Jeon, Heonsu
    Yao, Takafumi
    NANO LETTERS, 2008, 8 (08) : 2419 - 2422
  • [8] Optical characterization of periodically polarity-inverted ZnO structures on (0001) Al2O3 substrates (vol 13, pg 1213, 2013)
    Park, Jinsub
    Lee, Woong
    Ha, Jun-Seok
    Kwon, Min-Ki
    Lee, Hyo-Jong
    CURRENT APPLIED PHYSICS, 2013, 13 (08) : 1787 - 1787
  • [9] Catalyst-Free Growth of Vertically Aligned ZnO Nanostructures Arrays on Periodically Polarity-Inverted Substrate
    Park, Jinsub
    Kim, Ki Hyun
    Park, Sung Hyun
    Yoon, Euijoon
    Yao, Takafumi
    APPLIED PHYSICS EXPRESS, 2010, 3 (10)
  • [10] Vertical Array of ZnO Submicrorods on Periodically Polarity-Inverted Templates Using Solution Method
    Park, Jiwoong
    Moon, Daeyoung
    Chung, Sungyun
    Yoon, Euijoon
    Park, Jinsub
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2012, 12 (05) : 3966 - 3969
12345