Novel chemical processing for crystallization of SrBi2Ta2O9 thin films via UV irradiation

被引:13
作者
Nishizawa, K [1 ]
Miki, T [1 ]
Suzuki, K [1 ]
Kato, K [1 ]
机构
[1] Natl Inst Adv Ind Sci & Technol, Natl Ind Res Inst Nagoya, Kita Ku, Nagoya, Aichi 4628510, Japan
关键词
UV irradiation; chemical processing; crystallization; thin films; sol-get methods; layer-structured perovskite SrBi2Ta2O9;
D O I
10.1016/S0167-577X(01)00358-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The effects of UV irradiation on the crystallization of layer-structured perovskite. SrBi2Ta2O9 (SBT), thin films are discussed; the crystallinity and orientation of the films were improved by UV irradiation of the as-dried films. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:20 / 23
页数:4
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