Modelling and Finite Element Simulation of a Surface Acoustic Wave driven Linear Motor

被引：7

作者：

Behera, Basudeba ^{[1
]}

Nemade, Harshal B. ^{[1
]}

机构：

[1] Indian Inst Technol Guwahati, Dept Elect & Elect Engn, Gauhati 781039, Assam, India

来源：

INTERNATIONAL CONFERENCE ON VIBRATION PROBLEMS 2015 | 2016年 / 144卷

关键词：

Lithium niobate (LN); Rayleigh wave; SAW motor; USM;

D O I：

10.1016/j.proeng.2016.05.172

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

The paper presents modeling and finite element simulation of a surface acoustic wave (SAW) linear motor. A SAW linear motor works on the principle of friction drive provided by SAW propagating on a piezoelectric stator. The SAW motor comprises of a cubical slider driven by Rayleigh wave generated on a piezoelectric substrate using an interdigital transducer (IDT) fabricated on the stator. In the study, a lithium niobate piezoelectric substrate is used as the stator on which aluminum IDTs are fabricated at the two edges and a cuboid slider is placed in the path of SAW propagation along with a preload. The characteristics such as displacement, velocity and forces acting on the slider for different amplitudes of wave excitations are studied. The slider in the SAW motor can move both in forward and reverse directions and the motor attains a saturated velocity with the continuous wave excitation. (C) 2016 The Authors. Published by Elsevier Ltd.

引用

页码：1411 / 1418

页数：8

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