Effect of Soft X-ray Irradiation on Film Properties of a Hydrogenated Si-Containing DLC Film

被引：5

作者：

Kanda, Kazuhiro ^{[1
]}

Imai, Ryo ^{[1
]}

Tanaka, Shotaro ^{[1
]}

Suzuki, Shuto ^{[1
]}

Niibe, Masahito ^{[1
]}

Hasegawa, Takayuki ^{[1
]}

Suzuki, Tsuneo ^{[2
]}

Akasaka, Hiroki ^{[3
]}

机构：

[1] Univ Hyogo, Lab Adv Sci & Technol Ind, 3-1-2 Koto, Kamigori, Hyogo 6781205, Japan

[2] Nagaoka Univ Technol, Dept Nucl Syst Safety Engn, 1603-1 Kamitomioka Machi, Nagaoka, Niigata 9402188, Japan

[3] Tokyo Inst Technol, Sch Engn, Dept Mech Engn, Meguro Ku, 2-12-1 Ookayama, Tokyo 1528550, Japan

来源：

MATERIALS | 2021年 / 14卷 / 04期

关键词：

diamond-like carbon; Si containing diamond-like carbon film; soft X-ray; synchrotron radiation; X-ray reflectivity; elastic recoil detection analysis; Rutherford backscattering spectrometry; X-ray photoelectron spectroscopy; near-edge X-ray absorption fine structure;

D O I：

10.3390/ma14040924

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The effect of soft X-ray irradiation on hydrogenated silicon-containing diamond-like carbon (Si-DLC) films intended for outer space applications was investigated by using synchrotron radiation (SR). We found that the reduction in film thickness was about 60 nm after 1600 mA center dot h SR exposure, whereas there was little change in their elemental composition. The reduction in volume was attributable to photoetching caused by SR, unlike the desorption of hydrogen in the case of exposure of hydrogenated DLC (H-DLC) film to soft X-rays. The ratio of the sp(2) hybridization carbon and sp(3) hybridization carbon in the hydrogenated Si-DLC films, sp(2)/(sp(2) + sp(3)) ratio, increased rapidly from similar to 0.2 to similar to 0.5 for SR doses of less than 20 mA center dot h. SR exposure significantly changed the local structure of carbon atoms near the surface of the hydrogenated Si-DLC film. The rate of volume reduction in the irradiated hydrogenated Si-DLC film was 80 times less than that of the H-DLC film. Doping DLC film with Si thus suppresses the volume reduction caused by exposure to soft X-rays.

引用

页码：1 / 18

页数：17

共 49 条

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