Structure and chemistry of SiOx (x < 2) systems

被引:22
作者
Barranco, A
Yubero, F
Espinos, JP
Holgado, JP
Caballero, A
Gonzalez-Elipe, AR
Mejias, JA
机构
[1] Univ Seville, CSIC, Inst Ciencia Mat Sevilla, Seville 41092, Spain
[2] Univ Pablo Olavide, Fac Ciencias Expt, Seville 41013, Spain
关键词
D O I
10.1016/S0042-207X(02)00218-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The structure of SiOx materials and the chemical stability of Sin+ (n < 4) species have been investigated experimentally by photoemission and X-ray absorption spectroscopy. SiOx thin films and interface systems formed by small amounts of SiOx deposited on different substrates (Cu(1 0 0), TiO2(1 1 0), Al) have been studied. Theoretical analysis based on quantum mechanical calculations and cluster models have permitted to account for the stability of the different Sin+ chemical states and for some disproportionation reactions observed under certain experimental conditions. (C) 2002 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:491 / 499
页数:9
相关论文
共 24 条
  • [1] SIOX SURFACE STOICHIOMETRY BY XPS - A COMPARISON OF VARIOUS METHODS
    ALFONSETTI, R
    DESIMONE, G
    LOZZI, L
    PASSACANTANDO, M
    PICOZZI, P
    SANTUCCI, S
    [J]. SURFACE AND INTERFACE ANALYSIS, 1994, 22 (1-12) : 89 - 92
  • [2] XPS STUDIES ON SIOX THIN-FILMS
    ALFONSETTI, R
    LOZZI, L
    PASSACANTANDO, M
    PICOZZI, P
    SANTUCCI, S
    [J]. APPLIED SURFACE SCIENCE, 1993, 70-1 : 222 - 225
  • [3] Chemical stability of Sin+ species in SiOx (x&lt;2) thin films
    Barranco, A
    Mejías, JA
    Espinós, JP
    Caballero, A
    González-Elipe, AR
    Yubero, F
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2001, 19 (01): : 136 - 144
  • [4] PHOTOEMISSION-STUDY OF SIOX (0 LESS-THAN-OR-EQUAL-TO X LESS-THAN-OR-EQUAL-TO 2) ALLOYS
    BELL, FG
    LEY, L
    [J]. PHYSICAL REVIEW B, 1988, 37 (14): : 8383 - 8393
  • [5] SOL-GEL ROUTE TO SILICON SUBOXIDES - PREPARATION AND CHARACTERIZATION OF SILICON SESQUIOXIDE
    BELOT, V
    CORRIU, RJP
    LECLERCQ, D
    LEFEVRE, P
    MUTIN, PH
    VIOUX, A
    FLANK, AM
    [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1991, 127 (02) : 207 - 214
  • [6] Real-time measurements of Si 2p core level during dry oxidation of Si(100)
    Enta, Y
    Miyanishi, Y
    Irimachi, H
    Niwano, M
    Suemitsu, M
    Miyamoto, N
    Shigemasa, E
    Kato, H
    [J]. PHYSICAL REVIEW B, 1998, 57 (11) : 6294 - 6296
  • [7] Chemistry and diffusion processes at the SiOx-AlNy interface
    Espinos, JP
    Stabel, A
    Gonzalez-Elipe, AR
    [J]. SURFACE SCIENCE, 1998, 395 (2-3) : 326 - 341
  • [8] PROBING MATRIX-ISOLATED SIO MOLECULAR CLUSTERS BY X-RAY ABSORPTION-SPECTROSCOPY
    FLANK, AM
    KARNATAK, RC
    BLANCARD, C
    ESTEVA, JM
    LAGARDE, P
    CONNERADE, JP
    [J]. ZEITSCHRIFT FUR PHYSIK D-ATOMS MOLECULES AND CLUSTERS, 1991, 21 (04): : 357 - 366
  • [9] OPTICAL PROPERTIES OF SILICON MONOXIDE IN THE WAVELENGTH REGION FROM 0.24 TO 14.0 MICRONS
    HASS, G
    SALZBERG, CD
    [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1954, 44 (03) : 181 - 187
  • [10] HELMS CR, 1988, PHYSICS CHEM SIO2 SI