共 50 条
- [21] Structural and optical modifications of RF-sputtered ZnO thin films using low energy Ar ion irradiation Applied Physics A, 2021, 127
- [24] Structural and optical modifications of RF-sputtered ZnO thin films using low energy Ar ion irradiation APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2021, 127 (07):
- [25] DEPOSITION PROFILE OF RF-MAGNETRON-SPUTTERED BATIO(3) THIN-FILMS JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (3A): : 1484 - 1488
- [28] Effects of substrate temperature on the properties of sputtered TiN thin films Journal of Materials Science: Materials in Electronics, 2016, 27 : 2800 - 2808
- [29] Influences of sputtering power and substrate temperature on the properties of RF magnetron sputtered indium tin oxide thin films JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (6A): : 3448 - 3452