Si-based guided-mode resonance filter on a micro-optical bench

被引：3
作者：
Wang, CM [1 ]
Chang, JY
Hsu, CL
Lee, CC
Yang, JC
机构：
[1] Natl Cent Univ, Inst Opt Sci, Jung Li 32054, Taiwan
[2] ERSO, ITRI, Hsinchu, Taiwan
来源：
ELECTRONICS LETTERS | 2004年 / 40卷 / 21期
关键词：
D O I：
10.1049/el:20045657
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
An out-of-plane guided-mode resonance filter on a single Si chip using a two-layer polysilicon surface micromachining process has been proposed. To the best of the authors' knowledge, this is the first time that a monolithic optical filter has been integrated on a silicon microoptical bench. This device can be used as a bi-directional transceiver filter. The extinction ratio between 1550 and 13 10 run could be as low, as 40 dB and the channel passband at 1550 nm was 20 nm.
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收藏
页码：1335 / 1336
页数：2
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